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Journal of the American Ceramic Society, v.90 no.8, 2007년, pp.2327 - 2332
Iwasawa, Junichi , Nishimizu, Ryoichi , Tokita, Masahiro , Kiyohara, Masakatsu , Uematsu, Keizo
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Dense yttrium oxide film was prepared on a quartz substrate by the aerosol deposition process at the room temperature. The deposition rate was very high, 60 m/h. Thick film of 10 m was easily achievable on the quartz substrate. Transmission electron microscopy showed that the film was highly dense w...
Akedo, Jun, Lebedev, Maxim. Microstructure and Electrical Properties of Lead Zirconate Titanate (Pb(Zr52/Ti48)O3) Thick Films Deposited by Aerosol Deposition Method. Japanese journal of applied physics. Part 1, Regular papers, short notes and review papers, vol.38, no.b9, 5397-5401.
Akedo, Jun, Lebedev, Maxim. Influence of Carrier Gas Conditions on Electrical and Optical Properties of Pb(Zr, Ti)O3 Thin Films Prepared by Aerosol Deposition Method. Japanese journal of applied physics. Part 1, Regular papers, short notes and review papers, vol.40, no.b9, 5528-5532.
Akedo, Jun, Lebedev, Maxim. Powder Preparation in Aerosol Deposition Method for Lead Zirconate Titanate Thick Films. Japanese journal of applied physics. Part 1, Regular papers, short notes and review papers, vol.41, no.b11, 6980-6984.
Lebedev, M., Akedo, J., Mori, K., Eiju, T.. Simple self-selective method of velocity measurement for particles in impact-based deposition. Journal of vacuum science & technology. A, Vacuum, surfaces, and films, vol.18, no.2, 563-566.
Lebedev, Maxim, Akedo, Jun, Iwata, Atsushi, Sugimoto, Satoshi, Inomata, Kouichiro. NiZnCu Ferrite Thick Film with Nano Scale Crystallites Formed by the Aerosol Deposition Method. Journal of the American Ceramic Society, vol.87, no.9, 1621-1624.
Densification Mechanism of Ceramic Layers Akedo J. 1834 89 2006 Aerosol Deposition of Ceramic Thick Films at Room Temperature
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Wilkinson, Chris D. W.. Issues in Etching Compound and Si-based Devices. Japanese journal of applied physics. Part 1, Regular papers, short notes and review papers, vol.41, no.b6, 4261-4266.
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Kanoh, Masaaki, Yamage, Masashi, Takada, Hiroyuki. End-point Detection of Reactive Ion Etching by Plasma Impedance Monitoring. Japanese journal of applied physics. Part 1, Regular papers, short notes and review papers, vol.40, no.a3, 1457-1462.
Riu, Doh Hyung, Lee, Seok Woo, Jeong, Young Keun, Choi, Sung Churl. Microstructural Control of Y2O3 Coating on Quartz Glass for the Reduced Thermal Mismatch Stress. Key engineering materials, vol.264, 601-604.
Butler, D W. A simple film adhesion comparator. Journal of physics. E : Scientific instruments, vol.3, no.12, 979-980.
Burkstrand, J. M.. Summary Abstract: Chemical interactions at polymer-metal interfaces and the correlation with adhesion. The Journal of vacuum science and technology, vol.20, no.3, 440-441.
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TSUKUDA, Yasuo, MUTA, Akinori. Sintering of Y2O3 at High Temperatures. 窯業協會誌 = Journal of the Ceramic Association, Japan, vol.84, no.12, 585-589.
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