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Gate induced floating body effects in TiN/SiON and TiN/HfO2 gate stack triple gate SOI nFinFETs 원문보기

Solid-state electronics, v.51 no.9, 2007년, pp.1201 - 1210  

Rafí, J.M. (Centro Nacional de Microelectró) ,  Simoen, E. (nica (IMB-CNM-CSIC), Campus UAB, 08193 Bellaterra, Spain) ,  Mercha, A. (IMEC, Kapeldreef 75, B-3001 Leuven, Belgium) ,  Collaert, N. (IMEC, Kapeldreef 75, B-3001 Leuven, Belgium) ,  Hayama, K. (IMEC, Kapeldreef 75, B-3001 Leuven, Belgium) ,  Campabadal, F. (Kumamoto National College of Technology, 2569-2 Nishigoshi, Kumamoto 861-1102, Japan) ,  Claeys, C. (Centro Nacional de Microelectró)

Abstract AI-Helper 아이콘AI-Helper

AbstractIn this paper, the appearance of gate induced floating body effects in triple gate SOI nFinFETs with TiN/SiON and TiN/HfO2 gate stacks is investigated. Different floating body effects (FBEs) are found to appear under moderate accumulation back gate bias (VBG) conditions in devices with wide ...

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