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Abstract ▼ AI-Helper

Anodized aluminum oxide (AAO) has been studied actively because of its advantages, such as simple control of the pore distance and compatibility to mass production. Though AAO nanopatterns with periodicities between 50-500 nm have already been made, AAO patterns with small periodicity and high densi...

Anodized aluminum oxide (AAO) has been studied actively because of its advantages, such as simple control of the pore distance and compatibility to mass production. Though AAO nanopatterns with periodicities between 50-500 nm have already been made, AAO patterns with small periodicity and high density are still required for more advanced applications, like a template for the growth of quantum dots. In this paper, we report the fabrication of an AAO nano-pattern with a very high density of more than 1011/㎠. AAO nano-patterns were made with various electrolytes composed of H2SO4, H3PO4, and CrO3 and the pattern periodicity and quality were monitored. With increasing H2SO4, the pattern periodicity decreased, and a more aligned pattern was obtained. A smaller pattern was realized with a reduced anodizing voltage, and it was applied to high-density patterns. As a result, we fabricated a nano-pattern with a periodicity of 37 nm on a GaAs substrate.

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