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NTIS 바로가기Journal of micromechanics and microengineering.: structures, devices, and systems, v.20 no.5, 2010년, pp.055038 -
Jing, Xiangmeng (National Key Laboratory of Nano) , Chen, Di (National Key Laboratory of Nano) , Huang, Chuang (National Key Laboratory of Nano) , Chen, Xiang (National Key Laboratory of Nano) , Miao, Jianmin , Liu, Jingquan , Zhu, Jun
A novel type of MEMS probe card that uses polydimethylsiloxane (PDMS) as an elastic substrate was designed and fabricated by MEMS technology. This proposed probe card structure has the advantages of good planarization, low resistance, higher probe density and a simplified fabrication process. To rea...
1988 601 Int. Test Conf. Proc. Brain L Farid M
Beiley, M., Leung, J., Wong, S.S.. A micromachined array probe card-characterization. IEEE transactions on components, packaging, and manufacturing technology. a publication of the IEEE Components, Packaging, and Manufacturing Technology Society and the IEEE Lasers and Electro-Optics S, vol.18, no.1, 184-191.
Beiley, M., Leung, J., Wong, S.S.. A micromachined array probe card-fabrication process. IEEE transactions on components, packaging, and manufacturing technology. a publication of the IEEE Components, Packaging, and Manufacturing Technology Society and the IEEE Lasers and Electro-Optics S, vol.18, no.1, 179-183.
Itoh, Toshihiro, Kawamura, Shingo, Kataoka, Kenichi, Suga, Tadatomo. Electroplated Ni microcantilever probe with electrostatic actuation. Sensors and actuators. A, Physical, vol.123, 490-496.
Zhang, Yanwei, Zhang, Yongxia, Marcus, R.B.. Thermally actuated microprobes for a new wafer probe card. Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems, vol.8, no.1, 43-49.
Kataoka, Kenichi, Kawamura, Shingo, Itoh, Toshihiro, Ishikawa, Kaoru, Honma, Hideo, Suga, Tadatomo. Electroplating Ni micro-cantilevers for low contact-force IC probing. Sensors and actuators. A, Physical, vol.103, no.1, 116-121.
2006 10.1088/0960-1317/16/7/014 16 1215 0960-1317 J. Micromech. Microeng. Wang F
2002 10.1088/0960-1317/12/5/321 12 650 0960-1317 J. Micromech. Microeng. Park S
Cho, Younghak, Kuki, Tony, Fukuta, Yamato, Fujita, Hiroyuki, Kim, Beomjoon. Fabrication of sharp knife-edged micro probe card combined with shadow mask deposition. Sensors and actuators. A, Physical, vol.114, no.2, 327-331.
Kim, Soo Hong, Na, Sun Woong, Lee, N.-E., Nam, Yun Woo, Kim, Young-Ho. Effect of surface roughness on the adhesion properties of Cu/Cr films on polyimide substrate treated by inductively coupled oxygen plasma. Surface & coatings technology, vol.200, no.7, 2072-2079.
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