참고문헌 (30)

1. [1] Yuen T G H, Agnew W F and Bullara L A 1987 Tissue response to potential neuroprosthetic materials implanted subdurally Biomaterials 8 138–41 10.1016/0142-9612(87)90103-7 Tissue response to potential neuroprosthetic materials implanted subdurally Yuen T G H, Agnew W F and Bullara L A Biomaterials 0142-9612 8 1987 138 141 

   상세보기

2. [2] Meng E and Tai Y-C 2005 Proc. 18th IEEE Int. Conf Micro Electro Mechanical Systems 2005 (MEMS 2005) Parylene etching techniques for microfluidics and bioMEMS 568–71 10.1109/MEMSYS.2005.1453993 Meng E and Tai Y-C Proc. 18th IEEE Int. Conf Micro Electro Mechanical Systems 2005 (MEMS 2005) 2005 568 571 

   

3. [3] Loeb G E, Bak M J, Salcman M and Schmidt E M 1977 Parylene as a chronically stable, reproducible microelectrode insulator IEEE Trans. Biomed. Eng. 24 121–8 10.1109/TBME.1977.326115 Parylene as a chronically stable, reproducible microelectrode insulator Loeb G E, Bak M J, Salcman M and Schmidt E M IEEE Trans. Biomed. Eng. 0018-9294 BME-24 2 1977 121 128 

   상세보기

4. [4] Hsu J-M, Rieth L, Normann R A, Tathireddy P and Solzbacher F 2009 Encapsulation of an integrated neural interface device with Parylene C IEEE Trans. Biomed. Eng 56 23–9 10.1109/TBME.2008.2002155 Encapsulation of an integrated neural interface device with Parylene C Hsu J-M, Rieth L, Normann R A, Tathireddy P and Solzbacher F IEEE Trans. Biomed. Eng 0018-9294 56 2009 23 29 

   상세보기

5. [5] Meng E, Li P-Y and Tai Y-C 2008 Plasma removal of Parylene C J. Micromech. Microeng. 18 045004 10.1088/0960-1317/18/4/045004 Plasma removal of Parylene C Meng E, Li P-Y and Tai Y-C J. Micromech. Microeng. 0960-1317 18 4 045004 2008 

   상세보기

6. [6] Hassler C, von Metzen R P, Ruther P and Stieglitz T 2010 Characterization of parylene C as an encapsulation material for implanted neural prostheses J. Biomed. Mater. Res. B Appl. Biomater. 93B 266–74 Characterization of parylene C as an encapsulation material for implanted neural prostheses Hassler C, von Metzen R P, Ruther P and Stieglitz T J. Biomed. Mater. Res. B Appl. Biomater. 1552-4973 93B 2010 266 274 

7. [7] Wen L, Wouters K, Ceyssens F, Witvrouw A and Puers R 2012 A Parylene temporary packaging technique for MEMS wafer handling Sensors Actuators 186 289–97 10.1016/j.sna.2012.03.047 A Parylene temporary packaging technique for MEMS wafer handling Wen L, Wouters K, Ceyssens F, Witvrouw A and Puers R Sensors Actuators 186 2012 289 297 

   상세보기

8. [8] Chang J H, Lu B and Tai Y-C 2011 Adhesion-enhancing surface treatments for parylene deposition Proc. 16th Int. Conf. Solid-State Sensors Actuators Microsystems (TRANSDUCERS) (Beijing, June 2011) 390–3 Adhesion-enhancing surface treatments for parylene deposition Chang J H, Lu B and Tai Y-C Proc. 16th Int. Conf. Solid-State Sensors Actuators Microsystems (TRANSDUCERS) 2011 390 393 

9. [9] Huang R and Tai Y C 2009 Parylene to Si adhesion enhancement Proc. Int. Conf. Solid-State Sensors Actuators Microsystems (TRANSDUCERS) (Denver, CO, June 2009) 1027–30 Parylene to Si adhesion enhancement Huang R and Tai Y C Proc. Int. Conf. Solid-State Sensors Actuators Microsystems (TRANSDUCERS) 2009 1027 1030 

10. [10] Xie X, Rieth L, Williams L, Negi S, Bhandari R, Caldwell R, Sharma R, Tathireddy P and Solzbacher F 2014 Long-term reliability of Al2O3 and Parylene C bilayer encapsulated Utah electrode array based neural interfaces for chronic implantation J. Neural Eng 11 026016 10.1088/1741-2560/11/2/026016 Long-term reliability of Al2O3 and Parylene C bilayer encapsulated Utah electrode array based neural interfaces for chronic implantation Xie X, Rieth L, Williams L, Negi S, Bhandari R, Caldwell R, Sharma R, Tathireddy P and Solzbacher F J. Neural Eng 1741-2552 11 2 026016 2014 

    상세보기

11. [11] Xie X, Rieth L, Merugu S, Tathireddy P and Solzbacher F 2012 Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics Appl. Phys. Lett 101 093702 10.1063/1.4748322 Plasma-assisted atomic layer deposition of Al2O3 and parylene C bi-layer encapsulation for chronic implantable electronics Xie X, Rieth L, Merugu S, Tathireddy P and Solzbacher F Appl. Phys. Lett 101 093702 2012 

    상세보기

12. [12] Xie X, Rieth L, Caldwell R, Diwekar M, Tathireddy P, Sharma R and Solzbacher F 2013 Long-term bilayer encapsulation performance of atomic layer deposited Al2O3 and Parylene C for biomedical implantable devices IEEE Trans. Biomed. Eng. 60 2943–51 10.1109/TBME.2013.2266542 Long-term bilayer encapsulation performance of atomic layer deposited Al2O3 and Parylene C for biomedical implantable devices Xie X, Rieth L, Caldwell R, Diwekar M, Tathireddy P, Sharma R and Solzbacher F IEEE Trans. Biomed. Eng. 0018-9294 60 2013 2943 2951 

    상세보기

13. [13] Charmet J, Bitterli J, Sereda O, Liley M, Renaud P and Keppner H 2013 Optimizing Parylene C adhesion for MEMS processes: potassium hydroxide wet etching J. Microelectromech. Syst 22 855–64 10.1109/JMEMS.2013.2248126 Optimizing Parylene C adhesion for MEMS processes: potassium hydroxide wet etching Charmet J, Bitterli J, Sereda O, Liley M, Renaud P and Keppner H J. Microelectromech. Syst 1057-7157 22 2013 855 864 

    상세보기

14. [14] Gilgunn P J et al 2012 An ultra-compliant, scalable neural probe with molded biodissolvable delivery vehicle Proc. IEEE 25th Int. Conf. Micro Electro Mechanical Systems (MEMS) (Paris, January–February 2012) 56–9 An ultra-compliant, scalable neural probe with molded biodissolvable delivery vehicle Gilgunn P J et al Proc. IEEE 25th Int. Conf. Micro Electro Mechanical Systems (MEMS) 2012 56 59 

15. [15] Selvarasah S, Chao S H, Chen C-L, Sridhar S, Busnaina A, Khademhosseini A and Dokmeci M R 2008 A reusable high aspect ratio parylene-C shadow mask technology for diverse micropatterning applications Sensors Actuators Phys. 145–6 306–15 10.1016/j.sna.2007.10.053 A reusable high aspect ratio parylene-C shadow mask technology for diverse micropatterning applications Selvarasah S, Chao S H, Chen C-L, Sridhar S, Busnaina A, Khademhosseini A and Dokmeci M R Sensors Actuators Phys. 0924-4247 145-146 2008 306 315 

    상세보기

16. [16] Madou M J 2002 Fundamentals of Microfabrication: The Science of Miniaturization 2nd edn (Boca Raton: CRC Press) Madou M J Fundamentals of Microfabrication: The Science of Miniaturization 2002 

17. [17] Gorham W F 1966 A new, general synthetic method for the preparation of linear Poly-p-xylylenes J. Polym. Sci. [A1] 4 3027–39 10.1002/pol.1966.150041209 A new, general synthetic method for the preparation of linear Poly-p-xylylenes Gorham W F J. Polym. Sci. [A1] 4 1966 3027 3039 

    상세보기

18. [18] Packham D E 2006 Peel Tests. (Chichester: Wiley) 311–5 Packham D E Handbook of Adhesion 2006 311 315 

19. [19] Gervason G, Ducom J and Cheradame H 1989 Relationship between surface energy and adhesion strength in polyethylene—paper composites Br. Polym. J. 21 53–9 10.1002/pi.4980210109 Relationship between surface energy and adhesion strength in polyethylene—paper composites Gervason G, Ducom J and Cheradame H Br. Polym. J. 0007-1641 21 1989 53 59 

    상세보기

20. [20] Shih V C-Y, Harder T A and Tai Y-C 2003 Yield strength of thin-film Parylene-C Proc. Symp. Design, Test, Integr. Packag. MEMSMOEMS 394–8 Yield strength of thin-film Parylene-C Shih V C-Y, Harder T A and Tai Y-C Proc. Symp. Design, Test, Integr. Packag. MEMSMOEMS 2003 394 398 

21. [21] Mitchell C J, Yang G-R and Senkevich J J 2006 Adhesion aspects of poly(p-xylylene) to SiO2 surfaces using γ-methacryloxypropyltrimethoxysilane as an adhesion promoter J. Adhes. Sci. Technol 20 1637–47 10.1163/156856106778884217 Adhesion aspects of poly(p-xylylene) to SiO2 surfaces using γ-methacryloxypropyltrimethoxysilane as an adhesion promoter Mitchell C J, Yang G-R and Senkevich J J J. Adhes. Sci. Technol 0169-4243 20 2006 1637 1647 

    상세보기

22. [22] Slavov S V, Sanger A R and Chuang K T 2000 Mechanism of silation of silica with hexamethyldisilazane J. Phys. Chem. B 104 983–9 10.1021/jp991715v Mechanism of silation of silica with hexamethyldisilazane Slavov S V, Sanger A R and Chuang K T J. Phys. Chem. 1089-5647 104 B 2000 983 989 

    상세보기

23. [23] Israelachvili J N 2011 Intermolecular and Surface Forces 3rd edn (Burlington: Academic Press) Rev Israelachvili J N Intermolecular and Surface Forces 2011 

24. [24] Young T 1805 An essay on the cohesion of fluids Philos. Trans. R. Soc. Lond 95 65–87 10.1098/rstl.1805.0005 An essay on the cohesion of fluids Young T Philos. Trans. R. Soc. Lond 0261-0523 95 1805 65 87 

    상세보기

25. [25] Owens D K and Wendt R C 1969 Estimation of the surface free energy of polymers J. Appl. Polym. Sci 13 1741–7 10.1002/app.1969.070130815 Estimation of the surface free energy of polymers Owens D K and Wendt R C J. Appl. Polym. Sci 0021-8995 13 1969 1741 1747 

    상세보기

26. [26] Fowkes F M 1962 Determination of interfacial tensions, contact angles, and dispersion forces in surfaces by assuming additivity of intermolecular interactions in surfaces J. Phys. Chem 66 382–382 10.1021/j100808a524 Determination of interfacial tensions, contact angles, and dispersion forces in surfaces by assuming additivity of intermolecular interactions in surfaces Fowkes F M J. Phys. Chem 66 1962 382 382 

    상세보기

27. [27] Chen-Cheng S, Shih-Chin L, Wen-Chi H and Jenn-Shyong H 2006 Surface free energy of alloy nitride coatings deposited using closed field unbalanced magnetron sputter ion plating Mater. Trans 47 2533–9 10.2320/matertrans.47.2533 Surface free energy of alloy nitride coatings deposited using closed field unbalanced magnetron sputter ion plating Chen-Cheng S, Shih-Chin L, Wen-Chi H and Jenn-Shyong H Mater. Trans 47 2006 2533 2539 

    상세보기

28. [28] Jańczuk B, Białopiotrowicz T and Zdziennicka A 1999 Some remarks on the components of the liquid surface free energy J. Colloid Interface Sci 211 96–103 10.1006/jcis.1998.5990 Some remarks on the components of the liquid surface free energy Jańczuk B, Białopiotrowicz T and Zdziennicka A J. Colloid Interface Sci 0021-9797 211 1 1999 96 103 

    상세보기

29. [29] Faucheux N, Schweiss R, Lützow K, Werner C and Groth T 2004 Self-assembled monolayers with different terminating groups as model substrates for cell adhesion studies Biomaterials 25 2721–30 10.1016/j.biomaterials.2003.09.069 Self-assembled monolayers with different terminating groups as model substrates for cell adhesion studies Faucheux N, Schweiss R, Lützow K, Werner C and Groth T Biomaterials 0142-9612 25 2004 2721 2730 

    상세보기

30. [30] Chaudhury M K 1996 Interfacial interaction between low-energy surfaces Mater. Sci. Eng. R: Rep. 16 97–159 10.1016/0927-796X(95)00185-9 Interfacial interaction between low-energy surfaces Chaudhury M K Mater. Sci. Eng. R: Rep. 0927-796X 16 1996 97 159 

    상세보기