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NTIS 바로가기Applied surface science, v.370, 2016년, pp.117 - 125
Yoon, Sung-Soo (Corresponding author.) , Lee, Yeong Bahl , Khang, Dahl-Young
Wet bulk micromachining of Si by metal-assisted chemical etching (MaCE) has successfully been demonstrated. Based on the mechanism of defective etching results from Ag and Au metal catalyst experiments, the wettability of etchant solution, in addition to metal type, has been found to have profound e...
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