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ACS applied materials & interfaces, v.8 no.24, 2016년, pp.15459 - 15465
Park, Chan Woo (Wearable Device Research Section, Electronics and Telecommunications Research Institute (ETRI), 218 Gajeong-ro, Yuseong-gu, Daejeon 34129,) , Moon, Yu Gyeong (Wearable Device Research Section, Electronics and Telecommunications Research Institute (ETRI), 218 Gajeong-ro, Yuseong-gu, Daejeon 34129,) , Seong, Hyejeong (Department of Chemical and Biomolecular Engineering & Graphene Research Center KI for Nanocentury, Korea Advanced Institute of Science and Technology (KAIST), 291 Daehak-ro, Yuseong-gu, Daejeon 34141,) , Jung, Soon Won (Wearable Device Research Section, Electronics and Telecommunications Research Institute (ETRI), 218 Gajeong-ro, Yuseong-gu, Daejeon 34129,) , Oh, Ji-Young (Wearable Device Research Section, Electronics and Telecommunications Research Institute (ETRI), 218 Gajeong-ro, Yuseong-gu, Daejeon 34129,) , Na, Bock Soon (Wearable Device Research Section, Electronics and Telecommunications Research Institute (ETRI), 218 Gajeong-ro, Yuseong-gu, Daejeon 34129,) , Park, Nae-Man (Wearable Device Research Section, Electronics and Telecommunications Research Institute (ETR) , Lee, Sang Seok , Im, Sung Gap , Koo, Jae Bon
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We demonstrate a new patterning technique for gallium-based liquid metals on flat substrates, which can provide both high pattern resolution (similar to 20 mu m) and alignment precision as required for highly integrated circuits. In a very similar manner as in the patterning of solid metal films by ...
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10.6023/A13060678
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