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NTIS 바로가기MRS bulletin, v.39 no.4, 2014년, pp.347 - 352
Antoniou, Nicholas , Rykaczewski, Konrad , Uchic, Michael D.
This article reviews recent developments and applications of two beam systems (focused ion beam [FIB] and scanning electron microscope [SEM]) for in situ characterization and manipulation of material at the micro- and nanoscale. In these applications, the sample may be manipulated, ion milled, mecha...
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