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[해외논문] In situ FIB-SEM characterization and manipulation methods

MRS bulletin, v.39 no.4, 2014년, pp.347 - 352  

Antoniou, Nicholas ,  Rykaczewski, Konrad ,  Uchic, Michael D.

Abstract AI-Helper 아이콘AI-Helper

This article reviews recent developments and applications of two beam systems (focused ion beam [FIB] and scanning electron microscope [SEM]) for in situ characterization and manipulation of material at the micro- and nanoscale. In these applications, the sample may be manipulated, ion milled, mecha...

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