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NTIS 바로가기Journal of vacuum science & technology. A, Vacuum, surfaces, and films, v.33 no.2, 2015년, pp.020802 -
Kanarik, Keren J. (Lam Research Corporation , 4400 Cushing Parkway, Fremont, California 94538) , Lill, Thorsten (Lam Research Corporation , 4400 Cushing Parkway, Fremont, California 94538) , Hudson, Eric A. (Lam Research Corporation , 4400 Cushing Parkway, Fremont, California 94538) , Sriraman, Saravanapriyan (Lam Research Corporation , 4400 Cushing Parkway, Fremont, California 94538) , Tan, Samantha (Lam Research Corporation , 4400 Cushing Parkway, Fremont, California 94538) , Marks, Jeffrey (Lam Research Corporation , 4400 Cushing Parkway, Fremont, California 94538) , Vahedi, Vahid (Lam Research Corporation , 4400 Cushing Parkway, Fremont, California 94538) , Gottscho, Richard A. (Lam Research Corporation , 4400 Cushing Parkway, Fremont, California 94538)
Atomic layer etching (ALE) is a technique for removing thin layers of material using sequential reaction steps that are self-limiting. ALE has been studied in the laboratory for more than 25 years. Today, it is being driven by the semiconductor industry as an alternative to continuous etching and is...
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