[논문]Computer simulation of sputtering induced by swift heavy ions

Kucharczyk, P.; Fü; ngerlings, A.; Weidtmann, B.; Wucher, A.

doi:10.1016/j.nimb.2018.04.002

Computer simulation of sputtering induced by swift heavy ions

Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, v.426, 2018년, pp.5 - 12

Kucharczyk, P. (Corresponding author.) , Füngerlings, A. , Weidtmann, B. , Wucher, A.

Abstract ▼ AI-Helper

Abstract New experimental results regarding the mass and charge state distribution of material sputtered under irradiation with swift heavy ions suggest fundamental differences between the ejection mechanisms under electronic and nuclear sputtering conditions. In order to illustrate the difference, computer simulations based on molecular dynamics were performed to model the surface ejection process of atoms and molecules induced by a swift heavy ion track. In a first approach, the track is homogeneously energized by assigning a fixed energy to each atom with randomly oriented direction of motion within a cylinder of a given radius around the projectile ion trace. The remainder of the target crystal is assumed to be at rest, and the resulting lattice dynamics is followed by molecular dynamics. The resulting sputter yield is calculated as a function of track radius and energy and compared to corresponding experimental data in order to find realistic values for the effective deposited lattice energy density. The sputtered material is analyzed with respect to emission angle and energy as well as depth of origin. The results are compared to corresponding data from keV sputter simulations. As a second step of complexity, the homogeneous and monoenergetic lattice energization is replaced by a starting energy distribution described by a local lattice temperature. As a first attempt, the respective temperature is assumed constant within the track, and the results are compared with those obtained from monoenergetic energization with the same average energy per atom.

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Computer simulation of sputtering induced by swift heavy ions

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