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NTIS 바로가기Solid State Sensors and Actuators, 1997. TRANSDUCERS '97 Chicago., 1997 International Conference on, 1997 v.1, 1997년, pp.573 - 576
Wlodarski, W. (Dept. of Commun. & Electr. Eng., R. Melbourne Inst. of Technol., Vic., Australia) , Sun, Hong-Tao , Gurlo, A. , Gopel, W.
Novel ozone sensors based on In2O3 thin films on sapphire substrates with interdigitated comb structures have been prepared from indium isopropoxide solutions by the sol-gel process. Highly sensitive films have been obtained by using aged solutions. The annealing temperature was 500°C. Compared with earlier thin film devices, the advantages of these sensors include significantly higher ozone sensitivity (as large as 6 at 45 ppb), lower working temperature (below 200°C) and low production cost.
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