초록 ▼

In this cylindrical, magnetically-enhanced, sputtering cathode, the magnetic field at the cathode target is generated by applying an electric current through a hollow electrical conductor disposed within a tubular target, so that the electric current flowing along this conductor induces circular mag

In this cylindrical, magnetically-enhanced, sputtering cathode, the magnetic field at the cathode target is generated by applying an electric current through a hollow electrical conductor disposed within a tubular target, so that the electric current flowing along this conductor induces circular magnetic lines concentrically around its axis. By biasing negatively the tubular target immersed in a low pressure gas, a glow discharge is generated. Electrons, emitted from the target surface are accelerated radially by the electric field, but deviated perpendicularly by the magnetic field. The resulting motion is confined in a spirally-shaped area centered on the conductor axis.

대표청구항 ▼

A cylindrical, magnetically-enhanced, sputtering cathode which produces a thin film on the surface of an object, which comprises: a tubular target; a hollow electrical conductor disposed within the tubular target; means for applying an electric current through the conductor which generates a magneti

A cylindrical, magnetically-enhanced, sputtering cathode which produces a thin film on the surface of an object, which comprises: a tubular target; a hollow electrical conductor disposed within the tubular target; means for applying an electric current through the conductor which generates a magnetic field around the tubular target; and means for circulating a liquid coolant through the electrical conductor.