초록 ▼

A method and apparatus that solve the problem of accurate measurement of gas flow so that the delivery of gases in semiconductor processing may be performed with greater confidence and accuracy by performing real-time characterization of a lead-line for mass flow controller (MFC) flow verification a

A method and apparatus that solve the problem of accurate measurement of gas flow so that the delivery of gases in semiconductor processing may be performed with greater confidence and accuracy by performing real-time characterization of a lead-line for mass flow controller (MFC) flow verification are provided. In one embodiment a mass flow verifier (MFV) provides rate of rise information to a controller via a digital interface without correcting for lead-line influences. After receiving the rate of rise data, the tool host computer computes a gas mass correction factor in real-time based on at least one of the following: MFC temperature sensor data, lead-line temperature sensor data, lead-line pressure transducer data, and lead-line volume. The rate of rise data and gas mass correction factor are used to compute accurate mass flow. The accurate mass flow information may be used to calibrate the MFC.

대표청구항 ▼

1. A method for controlling gas flow in a semiconductor processing system, comprising: measuring a mass flow of gas without correcting for lead-line influences;determining a gas mass flow correction factor based on real-time pressure and temperature measurements from the lead-line;determining a corr

1. A method for controlling gas flow in a semiconductor processing system, comprising: measuring a mass flow of gas without correcting for lead-line influences;determining a gas mass flow correction factor based on real-time pressure and temperature measurements from the lead-line;determining a corrected mass flow of gas using the gas mass flow correction factor and the mass flow of gas information; andadjusting the gas flow in the semiconductor processing system, wherein the measuring a mass flow of gas without correcting for lead-line influences and the real-time temperature and pressure measurements from the lead-line are obtained simultaneously. 2. The method of claim 1, further comprising calibrating a mass flow controller using the corrected mass flow of gas. 3. The method of claim 1, wherein the mass flow of gas is determined through a rate of rise test. 4. The method of claim 3, wherein the rate of rise test is performed using a mass flow verifier (MFV) with a controlled volume with attached pressure and temperature measurement devices. 5. The method of claim 4, wherein the results of the rate of rise test are transmitted from the mass flow verifier to a computing environment where the mass flow of gas data may be stored in a controller. 6. The method of claim 1, wherein the corrected mass flow of gas is added to a mass of gas inside the controlled volume of a mass flow verifier (MFV) to calculate a total mass of gas within the MFV and the lead-line. 7. A method for controlling gas flow in a semiconductor processing system, comprising: measuring a mass flow of gas without correcting for lead-line influences;determining a gas mass flow correction factor based on real-time pressure and temperature measurements from the lead-line;determining a corrected mass flow of gas using the gas mass flow correction factor and the mass flow of gas information; andadjusting the gas flow in the semiconductor processing system, wherein the measuring a mass flow of gas without correcting for lead-line influences and the determining a gas mass flow correction factor based on real-time pressure and temperature measurements from the lead-line occur simultaneously. 8. The method of claim 7, further comprising calibrating a mass flow controller using the corrected mass flow of gas. 9. The method of claim 7, wherein the mass flow of gas is determined through a rate of rise test. 10. A method for controlling gas flow in a semiconductor processing system, comprising: measuring a rate of rise in pressure due to a flow of gas flowing into a mass flow verifier (MFV) without correcting for any influences in a lead-line coupling the MFV with a mass flow controller (MFC);determining a gas mass correction factor based on real-time temperature and pressure measurements of gas flowing through the lead-line;determining a mass flow of gas flowing through the lead-line using the gas mass correction factor and the rate of rise in pressure data; andadjusting the gas flow in the semiconductor processing system, wherein measuring the rate of rise in pressure and determining a gas mass correction factor occur simultaneously. 11. The method of claim 10, further comprising adding the mass of gas flowing through the lead-line to the mass of gas inside the controlled volume of the mass flow verifier to obtain the total mass of gas in the mass flow verifier and the lead-line. 12. The method of claim 10, further comprising calibrating a mass flow controller using the mass flow of gas flowing through the lead-line. 13. The method of claim 10, wherein the gas mass correction factor corrects for uniform and non-uniform mass distribution of gas inside the lead-line in real time. 14. The method of claim 10, wherein the MFV measures the rate of rise in pressure and the real-time temperature and pressure of gas flowing through the lead-line. 15. The method of claim 10, wherein a controller coupled with the processing system calculates the gas mass correction factor based on the temperature and pressure data. 16. The method of claim 15, wherein the controller calculates a corrected mass flow of gas using the gas mass correction factor and the rate of rise in pressure. 17. A method for controlling gas flow in a semiconductor processing system, comprising: measuring a rate of rise in pressure due to a flow of gas flowing into a mass flow verifier (MFV) without correcting for any lead-line influences while a controller simultaneously measures the pressure and temperature of gas flowing through the lead-line into the MFV;transmitting the temperature and pressure measurements from the controller to the MFV; anddetermining a corrected mass flow of gas with the MFV using the gas mass correction factor and rate of rise in pressure data. 18. The method of claim 17, wherein the transmitting the temperature and pressure measurements from the controller to the MFV occurs while measuring the rate of rise in pressure. 19. The method of claim 17, further comprising calibrating a mass flow controller using the corrected mass flow of gas. 20. The method of claim 17, wherein the lead-line couples the MFV with a mass flow controller (MFC).