초록 ▼

New methods of filling gaps with dielectric material are provided. The methods involve plasma-enhanced chemical vapor deposition (PECVD) of a flowable polymerized film in a gap, followed by an in-situ treatment to convert the film to a dielectric material. According to various embodiments, the in-si

New methods of filling gaps with dielectric material are provided. The methods involve plasma-enhanced chemical vapor deposition (PECVD) of a flowable polymerized film in a gap, followed by an in-situ treatment to convert the film to a dielectric material. According to various embodiments, the in-situ treatment may be a purely thermal or plasma treatment process. Unlike conventional PECVD processes of solid material, which deposit film in a conformal process, the deposition results in bottom-up fill of the gap. In certain embodiments, a deposition-in situ treatment-deposition-in situ treatment process is performed to form dielectric layers in the gap. The sequence is repeated as necessary for bottom up fill of the gap. Also in certain embodiments, an ex-situ post-treatment process is performed after gap fill is completed. The processes are applicable to frontend and backend gapfill.

대표청구항 ▼

1. A method of filling gaps on a substrate with dielectric material comprising: placing the substrate in a reaction chamber;introducing a process gas comprising a silicon-containing compound and an oxidant into the reaction chamber, wherein the oxidant is selected from oxygen (O2) and ozone (O3);exp

1. A method of filling gaps on a substrate with dielectric material comprising: placing the substrate in a reaction chamber;introducing a process gas comprising a silicon-containing compound and an oxidant into the reaction chamber, wherein the oxidant is selected from oxygen (O2) and ozone (O3);exposing the substrate to a plasma generated from the process gas under conditions, including a substrate temperature of between about 60° C. and 100° C., such that the silicon-containing compound and the oxidant plasma species react and condense such that an amorphous flowable organo-silicon polymer film is thereby deposited to partially fill the gaps via a substantially-high frequency-only HF capacitatively-coupled plasma-assisted reaction;converting the flowable film to a dielectric material via an in-situ treatment process; andrepeating the exposure and conversion operations at least once to fill the gaps. 2. The method of claim 1 further comprising transferring the substrate to a cure chamber and performing an ex-situ treatment process. 3. The method of claim 2 wherein the in-situ and ex-situ treatment processes remove substantially all of the carbon from the as-deposited flowable organosilicon film. 4. The method of claim 2 wherein the ex-situ treatment process comprises an ultraviolet thermal processing operation at a substrate temperature of at least about 400° C. 5. The method of claim 2 wherein the ex-situ treatment process comprises an thermal processing operation at a substrate temperature of at least about 700° C. 6. The method of claim 1 wherein silicon-containing compound is an organo-silane or an organo-siloxane. 7. The method of claim 1 wherein at least one gap has an aspect ratio of at least bout 10:1. 8. The method of claim 1 wherein at least one gap has an aspect ratio of at least about 15:1. 9. The method of claim 1 wherein the in-situ treatment process comprises exposing the film to an inert plasma, wherein the inert plasma is generated only from inert gases. 10. The method of claim 9 wherein the in-situ treatment process comprises exposing the film to an oxidizing plasma. 11. The method of claim 1 wherein the in-situ treatment process removes at least some of the carbon from the flowable organosilicon film. 12. The method of claim 1 wherein exposing the substrate to the process gas under conditions such that a flowable organo-silicon polymer film is deposited to partially fill the gaps via a capacitatively-coupled plasma-assisted reaction comprises pulsing the RF frequency. 13. The method of claim 1 wherein the deposited film in the gap comprises interfaces between sequentially deposited layers in the gap. 14. The method of claim 13 wherein the film in each gap comprises at least four interfaces. 15. The method of claim 1 wherein the dielectric constant of the film is between about 2.7 and 3.0. 16. The method of claim 1 wherein the ratio of S—CHx peaks to the Si—O peak is approximately 4% of the as-deposited flowable organosilicon polymer. 17. The method of claim 1 wherein the ratio of S—CH3 peak to the Si—O peak is approximately 7% of the as-deposited flowable organosilicon polymer. 18. The method of claim 1 further comprising pre-treating the substrate prior to depositing of the flowable film. 19. A method of filling gaps on a substrate with dielectric material comprising: introducing a process gas comprising a silicon-containing compound and an oxidant into the reaction chamber containing the substrate;exposing the substrate in an exposure operation to a plasma generated from the process gas under conditions such that an amorphous flowable organo-silicon polymer film is deposited to partially fill the gaps via a plasma-assisted reaction; andexposing the flowable organo-silicon polymer film in a treatment operation to an in-situ inert plasma, wherein the inert plasma is generated only from inert gases;repeating the exposure and treatment operations at least once to fill the gaps. 20. The method of claim 19 wherein the inert plasma is a He plasma. 21. A method of filling gaps on a substrate with dielectric material comprising: introducing a process gas comprising a silicon-containing compound and an oxidant into a reaction chamber housing the substrate, wherein the oxidant is selected from oxygen (O2) and ozone (O3);exposing the substrate to a plasma generated from the process gas under conditions such that the silicon-containing compound and the oxidant plasma species react and condense such that an amorphous flowable organo-silicon polymer film is thereby deposited to partially fill the gaps via a substantially-high frequency-only HF plasma-assisted reaction.