Recently, ESC for semiconductor processing is being developed in the direction of multi-zone heating of a heater capable of controlling micro-region temperature by embedding a heater for precise chucking force control and high-precision temperature control. In this process, since the uniformity of t...
Recently, ESC for semiconductor processing is being developed in the direction of multi-zone heating of a heater capable of controlling micro-region temperature by embedding a heater for precise chucking force control and high-precision temperature control. In this process, since the uniformity of the electrodes constituting the heater resistance affects the uniformity of the ESC temperature distribution, a systematic and quantitative study on the printing technology is required. Therefore, it is necessary to systematically study* A thesis submitted to the Council of the Graduate School of Kyungpook National University in partial fulfillment of the requirements for the degree of Master of Engineering in December 2020 the effect of printing process variables on electrode printing uniformity in screen printing for interior heaters and an evaluation method to evaluate them. However, until now, the results of quantitative research on printing uniformity are very insufficient. In addition, it is essential to optimize the printing process based on a quantitative evaluation method, and the result needs to be verified in terms of uniformity of resistance. In this study, a quantitative method for evaluating printability was proposed and the factors of evaluation were defined. For the experiment, the pattern was designed and used for screen printing. During printing, it was confirmed that snap off and increased squeegee speed increased the line width precision of the printed electrode regardless of the mesh change and acted as a process factor to lower the surface roughness of the printed surface. In addition, edge roughness, an index indicating the printing clarity of the pattern, was not significantly affected by snap off and squeegee speed during printing, and was highly dependent on basic requirements such as the viscosity of the paste and the mesh selection accordingly. The print thickness increased in proportion to the snap off and squeegee speed, but was basically highly dependent on the thickness of the screen mask. In order to evaluate the electrode printing process for vias, a method of quantitatively evaluating the printed vias by separating them after drying was proposed. In the printing experiment according to the size of the via hole, the height of the electrode filled in the via hole decreased as the snap off increased. However, increasing the squeegee speed acted as a process factor to increase the via filling height. As a result of optimizing the sintering manufacturing process of the alumina substrate for ESC including the optimization conditions of the printing process, it was confirmed that the resistance distribution of the embedded electrode decreased according to the optimization of the printing process.
Recently, ESC for semiconductor processing is being developed in the direction of multi-zone heating of a heater capable of controlling micro-region temperature by embedding a heater for precise chucking force control and high-precision temperature control. In this process, since the uniformity of the electrodes constituting the heater resistance affects the uniformity of the ESC temperature distribution, a systematic and quantitative study on the printing technology is required. Therefore, it is necessary to systematically study* A thesis submitted to the Council of the Graduate School of Kyungpook National University in partial fulfillment of the requirements for the degree of Master of Engineering in December 2020 the effect of printing process variables on electrode printing uniformity in screen printing for interior heaters and an evaluation method to evaluate them. However, until now, the results of quantitative research on printing uniformity are very insufficient. In addition, it is essential to optimize the printing process based on a quantitative evaluation method, and the result needs to be verified in terms of uniformity of resistance. In this study, a quantitative method for evaluating printability was proposed and the factors of evaluation were defined. For the experiment, the pattern was designed and used for screen printing. During printing, it was confirmed that snap off and increased squeegee speed increased the line width precision of the printed electrode regardless of the mesh change and acted as a process factor to lower the surface roughness of the printed surface. In addition, edge roughness, an index indicating the printing clarity of the pattern, was not significantly affected by snap off and squeegee speed during printing, and was highly dependent on basic requirements such as the viscosity of the paste and the mesh selection accordingly. The print thickness increased in proportion to the snap off and squeegee speed, but was basically highly dependent on the thickness of the screen mask. In order to evaluate the electrode printing process for vias, a method of quantitatively evaluating the printed vias by separating them after drying was proposed. In the printing experiment according to the size of the via hole, the height of the electrode filled in the via hole decreased as the snap off increased. However, increasing the squeegee speed acted as a process factor to increase the via filling height. As a result of optimizing the sintering manufacturing process of the alumina substrate for ESC including the optimization conditions of the printing process, it was confirmed that the resistance distribution of the embedded electrode decreased according to the optimization of the printing process.
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