최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기한국정밀공학회지 = Journal of the Korean Society for Precision Engineering, v.23 no.3 = no.180, 2006년, pp.156 - 162
박상후 (한국과학기술원 기계공학과 대학원) , 임태우 (한국과학기술원 기계공학과 대학원) , 양동열 (한국과학기술원 기계공학과)
Direct fabrication of nano patterns has been studied employing a nano-stereolithography (NSL) process. The needs of nano patterning techniques have been intensively increased for diverse applications for nano/micro-devices; micro-fluidic channels, micro-molds. and other novel micro-objects. For fabr...
* AI 자동 식별 결과로 적합하지 않은 문장이 있을 수 있으니, 이용에 유의하시기 바랍니다.
Rosolen, G.C., 'Automatically Aligned Electron Beam Lithography on the Nanometer Scale,' Appl. Surf. Sci., Vol. 144, No. 45, pp. 467-471, 1999
Dagata, lA., Schneir, J., Harary, H.H., Evans, C.J., Postek, M.T., Bennett, J., 'Modification of Hydrogen-passivated Silicon by a Scanning Tunneling Microscope Operating in Air,' Appl. Phys. Lett., Vol. 56, pp. 2001-2003, 1990
Piner, R.D., Zhu, J., Xu, F., Hong, S., Mirkin, C.A., 'Dip-Pen Nanolithography,' Science, Vol. 283, No. 29,pp.661-663, 1999
Chou, S.Y., Keimel, C., Gu, J., 'Ultrafast and direct imprint of nanostructures in silicon,' Nature, Vol. 417, No. 20, pp. 835-837, 2002
Xia, Y., Whitesides, G.M., 'Soft lithography,' Angew. Chem. Int. Ed., Vol.37, pp. 550-575, 1998
Kawata, S., Sun, H.B., Tanaka, T., Takada, K., 'Finer features for functional microdevices,' Nature, Vol. 412, No. 16, pp. 697-698, 2001
Serbin, J., Egbert, A., Ostendorf, A., Chichkov, B.N., 'Femtosecond laser-induced two-photon polymerization of inorganic-organic hybrid materials for applications in photonics,' Opt. Lett., Vol. 28, No. 5, pp. 301-303, 2003
Maruo, S., Kawata, S., 'Two-photon-absorbed nearinfrared photopolymerization for three-dimensional microfabrication,' J. of Microelectromechanical Syst., Vol. 7, No.4, pp. 411-415, 1998
Sun, H.B., Tanaka, T., Kawata, S., 'Three-dimensional focal spots related to two-photon excitation,' Appl. Phys. Lett., Vol. 80, No. 20, pp. 3673-3675, 2002
Park, S.H., Lim, T.W., Yang, D.Y., Kong, H.J., Lee, K.S., 'Fabrication Process of Nano-precision PDMS Replica using Vacuum Pressure-Difference Technique,' Polym.(Korea), Vol. 28, No.4, pp. 305-313, 2004
Lim, T.W., Park, S.H., Yang, D.Y., 'Contour Offset Algorithm (COA) for Precise Patterning in Two-photon Polymerization,' Microelectronic Eng., Vol. 77(3-4), pp. 382-388, 2005
Park, S.H., Lim, T.W., Yang, D.Y., Yi, S.W., Kong, H.J., 'Direct Fabrication of Micro-Patterns and Three-dimensional Structures using Nano Replication Printing (nRP) Process,' Sens. Mater., Vol. 17, No.2, pp. 65-75, 2005
Teh, W.H., Smith, C.G, Guntherodt, H.J., 'SU-8 for real three-dimensional subdiffraction-limit two-photon microfabrication,' Appl. Phys. Lett., Vol. 84, No. 20, pp. 4095-4097, 2004
Park, S.H., Lim, T.W, Yang, D.Y., Yi, S.W., Kong, H.J., 'Development of a nano replication printing (nRP) process,' J. KSPE, Vol. 21, No.2, pp. 210-217, 2004
Sun, H. B., Kawata, S., 'Two-Photon Photopolymerization and 3D Lithographic Microfabrication,' Adv. Polym. Sci., Vol. 170, pp. 169-273, 2004
*원문 PDF 파일 및 링크정보가 존재하지 않을 경우 KISTI DDS 시스템에서 제공하는 원문복사서비스를 사용할 수 있습니다.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.