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NTIS 바로가기전기화학회지 = Journal of the Korean Electrochemical Society, v.10 no.2, 2007년, pp.94 - 103
김수길 (한국과학기술연구원 연료전지연구단) , 강민철 (서울대학교 화학생물공학부) , 구효철 (서울대학교 화학생물공학부) , 조성기 (서울대학교 화학생물공학부) , 김재정 (서울대학교 화학생물공학부) , 여종기 (LG화학)
The transition of interconnection metal from aluminum alloy to copper has been introduced to meet the requirements of high speed, ultra-large scale integration, and high reliability of the semiconductor device. Since copper, which has low electrical resistivity and high resistance to degradation, ha...
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