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NTIS 바로가기한국시뮬레이션학회논문지 = Journal of the Korea Society for Simulation, v.18 no.2, 2009년, pp.65 - 75
허특 (창원대학교 산업시스템공학과) , 문덕희 (창원대학교 산업시스템공학과) , 박철순 (창원대학교 산업시스템공학과) , 장병림 (창원대학교 산업시스템공학과)
The semiconductor manufacturing process normally includes a great number of complex sequential steps those are related with various types of equipment. Such equipments are installed with the mixed patterns of serial or parallel structures while considering a number of engineering or environmental fa...
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