AI 본문요약

엑셀 다운로드 AI-Helper

* AI 자동 식별 결과로 적합하지 않은 문장이 있을 수 있으니, 이용에 유의하시기 바랍니다.

참고문헌 (20)

1. S. I. Vlaskina, "Silicon Carbide LED," Semiconductor Physics, Quantum Electronics & Optoelectronics, 5 [1] 71-5 (2001). 

2. A. Elasser and T. P. Chow, "Silicon Carbide Benefits and Advantages for Power Electronics Circuits and Systems," Proc. IEEE, 90 [6] 969-86 (2001). 

3. B. Ozpineci, L. M. Tolbert, S. K. Islam, and M. Hasanuzzaman, "Effects of Silicon Carbide (SiC) Power Devices on HEV PWM Inverter Losses," pp. 1061-6 in the Proceeding of the Industrial Electronics Soc. Annu. Conf., IEEE, Denver, Colorado, 2001. 

4. S. S. Hwan, S. W. Park, J. H. Han, K. S. Han, and C. M. Kim, "Mechanical Properties of Porous Reaction Bonded Silicon Carbide," J. Kor. Ceram. Soc., 39 [10] 948-54 (2002). 

   원문보기 상세보기

5. B. V. Manoj Kumar, M. H. Roh, Y. W. Kim, W. J. Kim, S. W. Park, and W. S. Seo, "Effect of Additive Composition on Microstructure and Mechanical Properties of SiC Ceramics Sintered with Small Amount of $RE_2O_3$ (RE: Sc, Lu, Y) and AlN," J. Mater. Sci., 44 5939-43 (2009). 

   상세보기

6. G. M. Kim, G. S. Cho, and S. W. Park, "Effects of ${\beta}$ -SiC Particle Seeds on Morphology and Size of High Purity ${\beta}$ -SiC Powder Synthesized using Sol-Gel Process," J. Kor. Ceram. Soc., 46 [5] 528-33 (2009). 

   원문보기 상세보기

7. L. Jiang, R. Cheung. R. Brown, and A. Mount, "Inductively Coupled Plasma Etching of SiC in $SF_6/O_2$ and Etch-induced Surface Chemical Bonding Modifications," J. Appl. Phys., 93 [3] 1376-83 (2003). 

   상세보기

8. N. J. Dartnell, M. C. Flowers, R. Greef, and J. Zhu, "Reactive Ion Etching of Silicon Carbide ( $Si_{x}C_{1-x}$ )," Vac., 46 [4] 349-55 (1995). 

   상세보기

9. B. W. Kim, S. M. Kong, and B. T. Lee, "Modeling SiC Etching in $C_2F_6/O_2$ Inductively Coupled Plasma Using Neural Networks," J. Vac. Sci. Technol. A, 20 [1] 146-52 (2002). 

   상세보기

10. Ho, Pauline, Johannes, E. Justine, Buss, J. Richard, and Meeks, Ellen, "Modeling the Plasma Chemistry of $C_2F_6\;and\;CHF_3$ Etching of Silicon Dioxide, with Comparisons to Etch Rate and Diagnostic Data," J. Vac. Sci. Technol. A, 19 [5] 2344-67 (2001). 

    상세보기

11. A. J. van Roosmalen, "Review: Dry Etching of Silicon Oxide," Vac., 34 429-36 (1984). 

    상세보기

12. M. Schaepkens, T. E. F. M. Standaert, N. R. Rueger, P. G. M. Sebel, and G. S. Oehrlein, "Study of the $SiO_2-to-Si_3N_4$ Etch Selectivity Mechanism in Inductively Coupled fluorocarbon Plasmas and a Comparison with the $SiO_2$ -to-Si mechanism," J. Vac. Sci. Technol. A, 17 [1] 26-37 (1999). 

    상세보기

13. M. Matsui, T. Tatsumi, and M. Sekine, "Observation of Surface Reaction Layers Formed in Highly Selective $SiO_2$ Etching," J. Vac. Sci Technol. A, 19 [4] 1282-8 (2001). 

    상세보기

14. K. Kurihara, Y. Yamaoka, K. Karehashi, and M. Sekine, "Measurements of Desorbed Products by Plasma Beam Irradiation on $SiO_2$ ," J. Vac. Sci. Technol. A, 22 [6] 2311-14 (2004). 

    상세보기

15. N. R. Rueger, J. J. Beulens, M. Schaepkens, M. F. Doemling, J. M. Mirza, T. E. F. M. Standaert, and G. S. Oehrlein, "Role of Steady State Fluorocarbon Films in the Etching of Silicon Dioxide using $CHF_3$ in an Inductively Coupled Plasma Reactor," J. Vac. Sci. Technol. A, 15 [4] 1881-9 (1997). 

    상세보기

16. T. E. F. M. Standaert, C Hedlund, E. A. Joseph, and G.S. Oehrlein, "Role of Fluorocarbon Film Formation in the Etching of Silicon, Silicon Dioxide, Silicon Nitride, and Amorphous Hydrogenated Silicon Carbide," J. Vac. Sci. Technol. A, 22 [1] 53-60 (2004). 

    상세보기

17. D. M. Kim, S. H. Lee, W. B. Alexander, K. B. Kim, Y. S. Oh, and S. M. Lee, "X-ray Photoelectron Spectroscopy Study on the Interaction of Yttrium-Aluminum Oxide with Fluorine-Based Plasma," J. Am. Ceram. Soc., 94 [10] 3455-9 (2011). 

    상세보기

18. T. Tatsumi, M. Matsui, M. Okigawa, and M. Sekine, "Control of Surface Reactions in High-Performance $SiO_2$ Etching," J. Vac. Sci. Technol. B, 18 [4] 1897-1902 (2000). 

    상세보기

19. A. J. van Roosmalen, J. A. G. Baggerman, and S. F. H. Brader, "Dry Etching for VLSI," pp. 99-135, Plenum Press, New York and London, 1991. 

20. B. Vincent Crist, "Advanced Peak-Fitting of Monochromatic XPS Spectra," J. Surf. Anal., 4 [3] 428-34 (1998). 

저자의 다른 논문 :

백용균 (8) 이성민 (21)