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[국내논문] A Review of Outgassing and Methods for its Reduction 원문보기

Applied science and convergence technology, v.26 no.5, 2017년, pp.95 - 109  

Grinham, Rebecca (Edwards Global Technology Centre, Innovation Drive) ,  Chew, Dr Andrew (Edwards Global Technology Centre, Innovation Drive)

Abstract AI-Helper 아이콘AI-Helper

There are several contributions to the gas load of a system of which often the most important is outgassing. Adsorption occurs via two main processes, physisorption and chemisorption, and can be described using five (or six) classifying isotherms. Outgassing is the result of desorption of previously...

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