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NTIS 바로가기전기전자재료학회논문지 = Journal of the Korean institute of electronic material engineers, v.33 no.2, 2020년, pp.88 - 92
Agrawal, Khushabu (Department of Electrical and Computer Engineering, Sungkyunkwan University) , Patil, Vilas (Materials and Devices Laboratory of Nanoelectronics, North Maharashtra University) , Yoon, Geonju (Department of Electrical and Computer Engineering, Sungkyunkwan University) , Park, Jinsu (Department of Electrical and Computer Engineering, Sungkyunkwan University) , Kim, Jaemin (Department of Electrical and Computer Engineering, Sungkyunkwan University) , Pae, Sangwoo (Technology Quality & Reliability Foundry Division, Samsung Electronics Co., LTD.) , Kim, Jinseok (Technology Quality & Reliability Foundry Division, Samsung Electronics Co., LTD.) , Cho, Eun-Chel (Department of Electrical and Computer Engineering, Sungkyunkwan University) , Junsin, Yi (Department of Electrical and Computer Engineering, Sungkyunkwan University)
Thermal effects in bulk and SOI FinFETs are briefly reviewed herein. Different techniques to measure these thermal effects are studied in detail. Self-heating effects show a strong dependency on geometrical parameters of the device, thereby affecting the reliability and performance of FinFETs. Mobil...
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