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NTIS 바로가기공업화학 = Applied chemistry for engineering, v.32 no.6, 2021년, pp.659 - 663
엄성현 (고등기술연구원 플랜트공정개발센터) , 이승준 ((주)플라즈마텍 부설연구소) , 고은하 ((주)플라즈마텍 부설연구소) , 홍기훈 (고등기술연구원 플랜트공정개발센터) , 황상연 (고등기술연구원 플랜트공정개발센터)
10 m3/min (CMM) multi-pollutants abatement system was successfully developed by effectively integrating ozone oxidation, wet scrubbing, and wet electrostatic precipitation for the simultaneous removal of particulate matters (PMs) and NOx in a semiconductor fabrication process. The sophisticated cont...
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