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한국결정성장학회지 = Journal of the Korean crystal growth and crystal technology, v.31 no.1, 2021년, pp.1 - 7
이한솔 (한국해양대학교 전자소재공학과) , 김소윤 (한국해양대학교 전자소재공학과) , 이정복 (한국해양대학교 전자소재공학과) , 안형수 (한국해양대학교 전자소재공학과) , 김경화 (한국해양대학교 전자소재공학과) , 양민 (한국해양대학교 전자소재공학과)
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ε-Ga2O3, a metastable phase of Ga2O3, has excellent compatibility with substrates having a hexagonal structure or a quasi-hexagonal structure, so that a film having a relatively lower surface roughness and defect density than β-Ga2O3 can be obtained easily. Accordingly, we attempted to fab...
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