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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.21 no.1, 2022년, pp.67 - 70
김기락 (가천대학교 전자공학과) , 조의식 (가천대학교 전자공학과) , 권상직 (가천대학교 전자공학과)
In order to prevent water vapor and oxygen permeation in the organic light emitting diodes (OLED), Al2O3 thin-film encapsulation (TFE) technology were investigated. Atomic layer deposition (ALD) method was used for making the Al2O3 TFE layer because it has superior barrier performance with advantage...
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