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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.21 no.1, 2022년, pp.12 - 16
배장호 (한국기술교육대학교 에너지신소재화학공학부 미래융합공학전공) , 이규만 (한국기술교육대학교 에너지신소재화학공학부 미래융합공학전공)
We have investigated the effect of the substrate temperature and hydrogen flow rate on the characteristics of IGZO thin films for the TCO (transparent conducting oxide). For this purpose, IGZO thin films were deposited by RF magnetron sputtering at room temperature and 300℃ with various H2 fl...
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