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NTIS 바로가기한국광학회지 = Korean journal of optics and photonics, v.33 no.5, 2022년, pp.201 - 209
인선자 ((주)엘립소테크놀러지) , 이민호 ((주)엘립소테크놀러지) , 조성용 ((주)엘립소테크놀러지) , 홍준선 ((주)엘립소테크놀러지) , 백인호 ((주)엘립소테크놀러지) , 권용현 ((주)엘립소테크놀러지) , 윤희규 ((주)엘립소테크놀러지) , 김상열 ((주)엘립소테크놀러지)
The previously developed microspot spectroscopic ellipsometer (SE) is upgraded to a microspot SE compatible with the atomic force microscope (AFM). The focusing optical system of the previous microspot SE is optimized to incorporate an AFM head. In addition, the rotating compensator ellipsometer in ...
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