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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.22 no.1, 2023년, pp.134 - 138
하주환 (서울대학교 차세대융합기술연구원 차세대전자재료연구실) , 신석윤 (서울대학교 차세대융합기술연구원 차세대전자재료연구실) , 김준영 (한국폴리텍대학 광주캠퍼스 스마트팩토리과) , 변창우 (서울대학교 차세대융합기술연구원 차세대전자재료연구실)
This study focuses on the analysis of the results of computational fluid dynamics simulations of mist-chemical vapor deposition for the growth of an epitaxial wafer in power semiconductor technology using artificial intelligence techniques. The conventional approach of predicting the uniformity of t...
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