참고문헌 (20)

1. M. Jung, J. Lee, S. K. Vishwanath, O.-S. Kwon, C. W. Ahn,？K. Shin, and S. Jeon, "Flexible multimodal sensor inspired？by human skin based on hair-type flow, temperature, and？pressure," Flex. Print. Electron., Vol. 5, No. 2, p. 025003,？2020. 

2. A. M. Kamat, X. Zheng, B. Jayawardhana, and A. G. P.？Kottapalli, "Bioinspired PDMS-graphene cantilever flow？sensors using 3D printing and replica moulding," Nanotechnol., Vol. 32, No. 9, p. 095501, 2021. 

3. H. Chong, J. Lou, K. M. Bogie, C. A. Zorman, and S. J. A.？Majerus, "Vascular Pressure-Flow Measurement Using？CB-PDMS Flexible Strain Sensor," IEEE T. Biomed. Circ.？S., Vol. 13, No. 6, pp. 1451-1461, 2019. 

4. V. Balakrishnana, T. Dinha, H.-P. Phana, D. V. Dao, and N.-？T. Nguyen, "Highly sensitive 3C-SiC on glass based thermal flow sensor realized using MEMS technology," Sens.？Actuators A-Phys., Vol. 279, pp. 293-305, 2018. 

   상세보기

5. Z. Wang, Z. Yi, R. Tian , M. Qin, Q.-A. Huang , Z.-F. Zhou,？and K. Long, "Analysis and Compensation of Benchmark？Drift of Micromachined Thermal Wind Sensor Caused by？Packaging Asymmetry," IEEE T. Ind. Electron., Vol. 69,？No. 1, pp. 950-959, 2022. 

6. C. M. Park , D. K. Choi , and S. H. Lee, "Study on the Fabrication and Evaluation of the MEMS Based Curved Beam？Air Flowmeter for the Vehicle Applications," J. Sens. Sci.？Technol., Vol. 25, No. 2, pp. 116-123, 2016. 

7. Y.-H. Wang, C.-Y. Lee, and C.-M. Chiang, "A MEMSbased Air Flow Sensor with a Free-standing Microcantilever Structure," Sensors, Vol. 7, No 10, pp. 2389-2401,？2007. 

   상세보기

8. L. Chen, G. Chen, and L. Lu, "Piezoresistive Behavior？Study on Finger-Sensing Silicone Rubber/Graphite？Nanosheet Nanocomposites," Adv. Funct. Mater., Vol. 17,？No. 6, pp. 898-904, 2007. 

   상세보기

9. J. Zhu, W. Song, and R. Huang, "Modulated Pencil-Drawn？U-Shaped Piezoresistive Graphite on Compound Fibers for？Wind Sensing," J. Electron. Mater., Vol. 47, No. 11, pp.？6518-6524, 2018. 

   상세보기

10. X. D. Wang, J. C. Wang , S. Biswas, H. Kim, and I. W.？Nam, "Mechanical, Electrical, and Piezoresistive Sensing？Characteristics of Epoxy-Based Composites Incorporating？Hybridized Networks of Carbon Nanotubes, Graphene, Carbon Nanofibers, or Graphite Nanoplatelets," Sensors, Vol.？20, No. 7, pp. 2094(1)-2094(17), 2020. 

11. https://www.thelec.kr/news/articleView.html?idxno16134 (retrieved on Jan. 2, 2023). 

12. https://www.komis.or.kr/common/download.do?fidselfInfoFile&file_seq383 (retrieved on Jan. 2, 2023). 

13. B. Seo, H. Hwang, S. Kang, K. Seo, D. Shin, and W. Choi,？"Flexible temperature-flow rate dual-parameter fluid sensors using geometric design of thermoelectric materials on？PET substrate," Proc. of the 2017 Spring Conf. of KSME on？Therm. Eng., pp. 55-56, 2017. 

14. H.-S. Park, P.-S. Shin, J.-H. Kim, Y.-M. Baek, and J.-M.？Park, "Optimal Manufacturing Conditions and Evaluation？of Sensing Performance for Graphite/Paper Sensors for？Composite Materials," Compos. Res., Vol. 31, No. 2, pp.？51-56, 2018. 

15. D. Keun Choi and S. H. Lee, "Air Flow Sensor with Corrugation Structure for Low Air Velocity Detection," J. Sens.？Sci. Technol., Vol. 20, No. 6, pp. 393-399, 2011. 

16. U. Galsanjamts, Study on the Properties of a Drag Force？Type Air Flowmeter with respect to Polysilicon Doping？Concentrations, M. S. thesis, Seoul National University of？Science and Technology, Seoul, 2021. 

17. Y. U. Lim, Y. J. Cho, and S. H. Lee, "Design and Fabrication of a Frag Force Type air Flowmeter with Poly-Silicon Piezoresistive Layer," Int. J. Mech. Mechatron. Eng.,？Vol. 18, No. 4, pp. 89-94, 2018. 

18. R. Hagihghi, A. Razmjou, Y. Orooji, M. E. Warkiani, M.？Asadnia, "A miniaturized piezoresistive flow sensor for？real-time monitoring of intravenous infusion," J. Biomed.？Mater. Res., Vol. 108, No. 2, pp. 568-576, 2020. 

19. D. Armani, C. Liu, and N. Aluru, "Re-configurable fluid？circuits by PDMS elastomer micromachining," Technical？Digest. of IEEE MEMS 99 Conf., Orlando, FL, USA, pp.？222-227, 1999. 

20. A. M. Kamat, B. Jayawardhana, and A. G. P. Kottapalli,？"PDMS Flow Sensors With Graphene Piezoresistors Using？3D-Printing and Soft Lithography," Proc. of 2020 IEEE？Sens., Rotterdam, Netherlands, pp. 1-4, 2020. 

저자의 다른 논문 :

이상훈 (9)