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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.22 no.3, 2023년, pp.14 - 20
임충환 (한국기술교육대학교대학원 메카트로닉스공학과) , 민동균 (한국기술교육대학교 메카트로닉스공학부) , 김성빈 (한국기술교육대학교대학원 메카트로닉스공학과)
The electrostatic chuck is a technology that uses electroadhesion to attach objects and is widely used in semiconductor and display processes. This research conducted Maxwell by varying parameters to examine the distribution and variations of chucking force in a bipolar-type ESC. The parameters that...
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