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NTIS 바로가기Review of scientific instruments, v.77 no.11, 2006년, pp.111101 -
Rose, Peter H. (Epion Corporation , 37 Manning Road, Billerica, Massachusetts 01821) , Ryding, Geoffrey (Applied Materials, Inc. , 66 Cherry Hill Drive, Beverly, Massachusetts 01915)
Manufacturing ion implantation equipment for doping semiconductors has grown into a two billion dollar business. The accelerators developed for nuclear physics research and isotope separation provided the technology from which ion implanters have been developed but the unique requirements of the sem...
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