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High Mobility Amorphous Indium-Gallium-Zinc-Oxide Thin-Film Transistor by Aluminum Oxide Passivation Layer

IEEE electron device letters : a publication of the IEEE Electron Devices Society, v.38 no.7, 2017년, pp.879 - 882  

Hu, Shiben (Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou, China) ,  Lu, Kuankuan (Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou, China) ,  Ning, Honglong (Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou, China) ,  Zheng, Zeke (Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou, China) ,  Zhang, Hongke (Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South China University of Technology, Guangzhou, China) ,  Fang, Zhiqiang (Institute of Polymer Optoelectronic Materials and Devices, State Key Laboratory of Luminescent Materials and Devices, South C) ,  Yao, Rihui ,  Xu, Miao ,  Wang, Lei ,  Lan, Linfeng ,  Peng, Junbiao ,  Lu, Xubing

Abstract AI-Helper 아이콘AI-Helper

This letter demonstrates a high-mobility amorphous indium–gallium–zinc oxide (a-IGZO) thin-film transistor (TFT) with aluminum oxide (Al2O3) passivation layer by radio frequency (RF) magnetron sputtering and copper (Cu) source/drain electrodes. The fabricated a-IGZO TFT exhibited 20 ti...

참고문헌 (20)

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  4. Jang, G., Lee, S.J., Kim, Y.C., Lee, S.H., Biswas, P., Lee, W., Myoung, J.M.. Device characteristics of amorphous indium-gallium-zinc-oxide channel capped with silicon oxide passivation layers. Materials science in semiconductor processing, vol.49, 34-39.

  5. Park, Jin-Seong, Jeong, Jae Kyeong, Mo, Yeon-Gon, Kim, Hye Dong, Kim, Sun-Il. Improvements in the device characteristics of amorphous indium gallium zinc oxide thin-film transistors by Ar plasma treatment. Applied physics letters, vol.90, no.26, 262106-.

  6. 10.1007/978-3-319-00002-2 

  7. Chowdhury, Md Delwar Hossain, Um, Jae Gwang, Jang, Jin. Remarkable changes in interface O vacancy and metal-oxide bonds in amorphous indium-gallium-zinc-oxide thin-film transistors by long time annealing at 250 °C. Applied physics letters, vol.105, no.23, 233504-.

  8. SID Symp Dig Tech Papers P-154l: Late-news poster: Stability enhancement of oxide tfts by blue laser annealing jin 2015 10.1002/sdtp.10069 46 1228 

  9. Chang, Seongpil, Do, Yun Seon, Kim, Jong‐Woo, Hwang, Bo Yeon, Choi, Jinnil, Choi, Byung‐Hyun, Lee, Yun‐Hi, Choi, Kyung Cheol, Ju, Byeong‐Kwon. Photo‐Insensitive Amorphous Oxide Thin‐Film Transistor Integrated with a Plasmonic Filter for Transparent Electronics. Advanced functional materials, vol.24, no.23, 3482-3487.

  10. Eungtaek Kim, Woo Jae Jang, Woohyun Kim, Junhong Park, Myung Keun Lee, Sang-Hee Ko Park, Kyung Cheol Choi. Suppressed Instability of a-IGZO Thin-Film Transistors Under Negative Bias Illumination Stress Using the Distributed Bragg Reflectors. IEEE transactions on electron devices, vol.63, no.3, 1066-1071.

  11. Liu, Po-Tsun, Chou, Yi-Teh, Teng, Li-Feng. Environment-dependent metastability of passivation-free indium zinc oxide thin film transistor after gate bias stress. Applied physics letters, vol.95, no.23, 233504-.

  12. Park, Jin-Seong, Jeong, Jae Kyeong, Chung, Hyun-Joong, Mo, Yeon-Gon, Kim, Hye Dong. Electronic transport properties of amorphous indium-gallium-zinc oxide semiconductor upon exposure to water. Applied physics letters, vol.92, no.7, 072104-.

  13. 10.7567/JJAP.51.076501 

  14. Xiao, Peng, Lan, Linfeng, Dong, Ting, Lin, Zhenguo, Shi, Wen, Yao, Rihui, Zhu, Xuhui, Peng, Junbiao. InGaZnO thin-film transistors with back channel modification by organic self-assembled monolayers. Applied physics letters, vol.104, no.5, 051607-.

  15. Acta Phys Sinica Improved performance of the amorphous indium-gallium-zinc oxide thin film transistor with cu-mo source/drain electrode ning 2015 10.7498/aps.64.126103 64 126103 

  16. SID Symp Dig Tech Papers 58.2: Distinguished Paper: Implementation of 240 Hz 55-inch ultra definition LCD driven by a-IGZO semiconductor TFT with copper signal lines gong 2012 10.1002/j.2168-0159.2012.tb05902.x 43 784 

  17. Appl Phys Lett Origin of threshold voltage instability in indium-gallium-zinc oxide thin film transistors jeong 2008 10.1063/1.2990657 93 123508 

  18. Nomura, Kenji, Ohta, Hiromichi, Takagi, Akihiro, Kamiya, Toshio, Hirano, Masahiro, Hosono, Hideo. Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors. Nature, vol.432, no.7016, 488-492.

  19. Hu, Shiben, Fang, Zhiqiang, Ning, Honglong, Tao, Ruiqiang, Liu, Xianzhe, Zeng, Yong, Yao, Rihui, Huang, Fuxiang, Li, Zhengcao, Xu, Miao, Wang, Lei, Lan, Linfeng, Peng, Junbiao. Effect of Post Treatment For Cu-Cr Source/Drain Electrodes on a-IGZO TFTs. Materials, vol.9, no.8, 623-.

  20. Yamazaki, Shunpei, Shima, Yukinori, Hosaka, Yasuharu, Okazaki, Kenichi, Koezuka, Junichi. Achievement of a high-mobility FET with a cloud-aligned composite oxide semiconductor. Japanese journal of applied physics, vol.55, no.11, 115504-.

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