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[해외논문] Effects of structure and oxygen flow rate on the photo-response of amorphous IGZO-based photodetector devices

Solid-state electronics, v.140, 2018년, pp.115 - 121  

Jang, Jun Tae (Corresponding author.) ,  Ko, Daehyun ,  Choi, Sungju ,  Kang, Hara ,  Kim, Jae-Young ,  Yu, Hye Ri ,  Ahn, Geumho ,  Jung, Haesun ,  Rhee, Jihyun ,  Lee, Heesung ,  Choi, Sung-Jin ,  Kim, Dong Myong ,  Kim, Dae Hwan

Abstract AI-Helper 아이콘AI-Helper

In this study, we investigated how the structure and oxygen flow rate (OFR) during the sputter-deposition affects the photo-responses of amorphous indium-gallium-zinc-oxide (a-IGZO)-based photodetector devices. As the result of comparing three types of device structures with one another, which are a...

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참고문헌 (32)

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