$\require{mediawiki-texvc}$

연합인증

연합인증 가입 기관의 연구자들은 소속기관의 인증정보(ID와 암호)를 이용해 다른 대학, 연구기관, 서비스 공급자의 다양한 온라인 자원과 연구 데이터를 이용할 수 있습니다.

이는 여행자가 자국에서 발행 받은 여권으로 세계 각국을 자유롭게 여행할 수 있는 것과 같습니다.

연합인증으로 이용이 가능한 서비스는 NTIS, DataON, Edison, Kafe, Webinar 등이 있습니다.

한번의 인증절차만으로 연합인증 가입 서비스에 추가 로그인 없이 이용이 가능합니다.

다만, 연합인증을 위해서는 최초 1회만 인증 절차가 필요합니다. (회원이 아닐 경우 회원 가입이 필요합니다.)

연합인증 절차는 다음과 같습니다.

최초이용시에는
ScienceON에 로그인 → 연합인증 서비스 접속 → 로그인 (본인 확인 또는 회원가입) → 서비스 이용

그 이후에는
ScienceON 로그인 → 연합인증 서비스 접속 → 서비스 이용

연합인증을 활용하시면 KISTI가 제공하는 다양한 서비스를 편리하게 이용하실 수 있습니다.

Solution-processed ternary alloy aluminum yttrium oxide dielectric for high performance indium zinc oxide thin-film transistors

Journal of alloys and compounds, v.741, 2018년, pp.1021 - 1029  

Lee, Jiwon (Corresponding author.) ,  Seul, Hyeonjoo ,  Jeong, Jae Kyeong

Abstract AI-Helper 아이콘AI-Helper

Abstract In this study, we evaluated the structural, chemical, and electrical properties of ternary alloy aluminum yttrium oxide (Al2-xYxO3) films prepared by employing a low-cost spin-cast technique. Al2-xYxO3 films annealed at 400 °C were found to possess smooth and excellent insulating chara...

주제어

참고문헌 (44)

  1. Nature Nomura 432 488 2004 10.1038/nature03090 Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors 

  2. Appl. Phys. Lett. Chiang 86 2005 10.1063/1.1843286 High mobility transparent thin-film transistors with amorphous zinc tin oxide channel layer 

  3. J. Infect. Dis. Hong 17 93 2016 A review of multi-stacked active-layer structures for solution-processed oxide semiconductor thin-film transistors 

  4. Adv. Mater. Fortunato 24 2945 2012 10.1002/adma.201103228 Oxide semiconductor thin-film transistors: a review of recent advances 

  5. J. Infect. Dis. Nam 17 65 2016 Beneficial effect of hydrogen in aluminum oxide deposited through the atomic layer deposition method on the electrical properties of an indium-gallium-zinc oxide thin-film transistors 

  6. Curr. Opin. Solid State Mater. Sci. Wager 18 53 2014 10.1016/j.cossms.2013.07.002 An amorphous oxide semiconductor thin-film transistor route to oxide electronics 

  7. J. Mater. Chem. C Seul 4 10486 2016 10.1039/C6TC03725A A solution-processed silicon oxide gate dielectric prepared at a low temperature via ultraviolet irradiation for metal oxide transistors 

  8. ACS Appl. Mater. Interfaces Je 6 18693 2014 10.1021/am504231h Solution-processable LaZrOx/SiO2 gate dielectric at low temperature of 180° C for high-performance metal oxide field-effect transistors 

  9. ACS Appl. Mater. Interfaces Liu 6 17364 2014 10.1021/am505602w Fully Solution-processed low-voltage aqueous In2O3 thin-film transistors using an ultrathin ZrOx dielectric 

  10. ACS Appl. Mater. Interfaces Baek 9 10904 2017 10.1021/acsami.7b01090 A comparative study of antimony doping effects on the performance of solution-processed ZIO and ZTO field-effect transistors 

  11. Appl. Phys. Lett. Adamopoulos 23 1894 2011 High-mobility low-voltage ZnO thin-film-transistors based on Y2O3 and Al2O3 high-k dielectrics deposited by spray pyrolysis in air 

  12. J. Mater. Chem. C Avis 21 10649 2011 10.1039/c1jm12227d High-performance solution processed oxide TFT with aluminum oxide gate dielectric fabricated by a sol-gel method 

  13. ACS Appl. Mater. Interfaces Jo 9 35114 2017 10.1021/acsami.7b09523 Ultralow-temperature solution-processed aluminum oxide dielectric via local structure control of nanoclusters 

  14. Adv. Funct. Mater. Esro 25 134 2015 10.1002/adfm.201402684 Wil I. Milne, G. Adamopoulos, High-mobility ZnO thin film transistors based on solution-processed hafnium oxide gate dielectrics 

  15. IEEE Electron. Device Lett. Azmi 38 1543 2017 10.1109/LED.2017.2758349 Performance Improvement of p-channel tin monoxide transistors with a solution-processed zirconium oxide gate dielectric 

  16. J. Alloy. Comp. Xiao 699 415 2017 10.1016/j.jallcom.2016.12.376 Interfacial modulation and electrical properties improvement of solution-processed ZrO2 gate dielectrics upon Gd incorporation 

  17. Adv. Electron. Mater. Esro 3 2017 10.1002/aelm.201700025 Solution-processed neodymium oxide/ZnO thin-film transistors with electron mobility in excess of 65 cmV-1s-1 

  18. J. Mater. Chem. C Ko 2 1050 2014 10.1039/C3TC31727G Solution-processed amorphous hafnium-lanthanum oxide gate insulator for oxide thin-film transistors 

  19. J. Phys. D Appl. Phys. Hu 49 2016 10.1088/0022-3727/49/11/115109 Thermally stable yttrium-scandium oxide high-k dielectrics deposited by a solution process 

  20. ACS Appl. Mater. Interfaces Woods 9 10897 2017 10.1021/acsami.7b00915 High-κ lanthanum zirconium oxide thin film dielectrics from aqueous solution precursors 

  21. J. Alloy. Comp. Li 731 150 2018 10.1016/j.jallcom.2017.10.019 Solution-processed HfGdO gate dielectric thin films for CMOS application: effect of annealing temperature 

  22. Mater. Sci. Eng. R Rep. Park 114 1 2017 10.1016/j.mser.2017.01.003 Sol-gel metal oxide dielectrics for all-solution-processed electronics 

  23. ACS Appl. Mater. Interfaces Afouxenidis 7 7334 2015 10.1021/acsami.5b00561 ZnO-based thin film transistors employing aluminum titanate gate dielectrics deposited by spray pyrolysis at ambient air 

  24. Nano Lett. Wang 10 2024 2010 10.1021/nl100022u Growth and performance of yttrium oxide as an ideal high-κ gate dielectric for carbon-based electronics 

  25. Appl. Phys. Lett. Nomura 99 2011 10.1063/1.3622121 Highly stable amorphous In-Ga-Zn-O thin-film transistors produced by eliminating deep subgap defects 

  26. Surf. Coating. Technol. Lei 229 226 2013 10.1016/j.surfcoat.2012.03.074 Evolution of Composition, Microstructure and optical properties of yttrium oxide thin films with substrate temperature 

  27. J. Am. Chem. Soc. Hennek 134 9593 2012 10.1021/ja303589v Exploratory combustion synthesis: amorphous indium yttrium oxide for thin-film transistors 

  28. Thin Solid Films Jeong 519 5740 2011 10.1016/j.tsf.2010.12.210 Effects of Hf incorporation in solution-processed Hf-InZnO TFTs 

  29. Appl. Surf. Sci. Amor 153 172 2000 10.1016/S0169-4332(99)00354-2 XPS characterisation of plasma-treated and alumina-coated PMMA 

  30. Langmuir Lefevre 18 7530 2002 10.1021/la025651i Hydration of γ-alumina in water and its effects on surface reactivity 

  31. Surf. Coating. Technol. Barve 204 3167 2010 10.1016/j.surfcoat.2010.03.003 Microwave ECR plasma CVD of cubic Y2O3 coatings and their characterization 

  32. MRS Bull. Robertson 27 217 2002 10.1557/mrs2002.74 Electronic structure and band offsets of high-dielectric-constant gate oxides 

  33. J. Mater. Chem. C Song 22 2012 A solution-processed yttrium oxide gat insulator for high-performance all-solution-processed fully transparent thin film transistors 

  34. Electrochem. Solid State Lett. Pi 15 G5 2011 10.1149/2.008203esl Unipolar memristive switching in yttrium oxide and reset current reduction using a yttrium interlayer 

  35. Jpn. J. Appl. Phys. Lin 55 2016 10.7567/JJAP.55.126201 Characteristics of yttrium fluoride and yttrium oxide coatings for plasma process equipment prepared by atmospheric plasma spraying 

  36. Rep. Prog. Phys. Robertson 69 327 2006 10.1088/0034-4885/69/2/R02 High dielectric constant gate oxides for metal oxide Si transistors 

  37. Adv. Mater. Lee 27 5043 2015 10.1002/adma.201502239 Large-scale precise printing of ultrathin sol-gel oxide dielectrics for directly patterned solution-processed metal oxide transistor arrays 

  38. Appl. Phys. Lett. Esro 106 2015 10.1063/1.4921262 Solution processed lanthanum aluminate gate dielectrics for use in metal oxide-based thin film transistors 

  39. Phys. Rev. Lett. Zaanen 55 418 1985 10.1103/PhysRevLett.55.418 Band gaps and electronic structure of transition-metal compounds 

  40. Acta Mater. Wang 52 809 2004 10.1016/j.actamat.2003.10.016 Grain boundary segregation in yttrium-doped polycrystalline TiO2 

  41. Beilstein J. Nanotechnol. Straumal 7 1936 2016 10.3762/bjnano.7.185 Ferromagnetic behaviour of ZnO: the role of grain boundaries 

  42. Rev. Adv. Mater. Sci. Straumal 41 61 2015 Grain boundaries as a source of ferromagnetism and increased solubility of Ni in nanograined ZnO 

  43. Galetz 2015 InTech Coatings for superalloys, superalloys 

  44. Acta Mater. Guo 51 2539 2003 10.1016/S1359-6454(03)00052-1 Grain size dependent grain boundary defect structure: case of doped zirconia 

LOADING...

관련 콘텐츠

이 논문과 함께 이용한 콘텐츠

저작권 관리 안내
섹션별 컨텐츠 바로가기

AI-Helper ※ AI-Helper는 오픈소스 모델을 사용합니다.

AI-Helper 아이콘
AI-Helper
안녕하세요, AI-Helper입니다. 좌측 "선택된 텍스트"에서 텍스트를 선택하여 요약, 번역, 용어설명을 실행하세요.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.

선택된 텍스트

맨위로