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NTIS 바로가기Physica status solidi. PSS. A, Applications and materials science, v.215 no.10, 2018년, pp.1700650 -
Hwang, Il‐Hwan (Department of Electrical and Computer Engineering, and Inter‐) , Eom, Su‐Keun (University Semiconductor Research Center Seoul National University Seoul 151‐) , Choi, Gwang‐Ho (744 Korea) , Kang, Myoung‐Jin (Department of Electrical and Computer Engineering, and Inter‐) , Lee, Jae‐Gil (University Semiconductor Research Center Seoul National University Seoul 151‐) , Cha, Ho‐Young (744 Korea) , Seo, Kwang‐Seok (Department of Electrical and Computer Engineering, and Inter‐)
A high‐performance E‐mode AlGaN/GaN MIS‐HEMTs is fabricated with atomic layer deposited 5 nm SiON/16 nm HfON and with atomic layer deposited 22 nm HfON gate insulator and their characteristics are compared. Plasma nitridation is employed in every atomic layer deposition cycle to...
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Robertson, J., Falabretti, B.. Band offsets of high K gate oxides on III-V semiconductors. Journal of applied physics, vol.100, no.1, 014111-.
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Xiong, K., Robertson, J., Clark, S. J.. Passivation of oxygen vacancy states in HfO2 by nitrogen. Journal of applied physics, vol.99, no.4, 044105-.
Woojin Choi, Hojin Ryu, Namcheol Jeon, Minseong Lee, Ho-Young Cha, Kwang-Seok Seo.
Improvement of
T.‐L.Wu D.Marcon B.De Jaeger M.Van Hove B.Bakeroot D.Lin S.Stoffels X.Kang R.Roelofs G.Groeseneken S.Decoutere Proc. Int. Symp. Power Semiconductor Devices and IC's (ISPSD) 225 2015.
Bong-Ryeol Park, Jae-Gil Lee, Woojin Choi, Hyungtak Kim, Kwang-Seok Seo, Ho-Young Cha.
High-Quality ICPCVD
Balachander, Krishnan, Arulkumaran, Subramanium, Egawa, Takashi, Sano, Yoshiaki, Baskar, Krishnan. A comparison on the Electrical Characteristics of SiO2, SiON and SiN as the Gate Insulators for the Fabrication of AlGaN/GaN Metal–Oxide/Insulator–Semiconductor High-Electron Mobility-Transistors. Japanese journal of applied physics. Part 1, Regular papers, short notes and review papers, vol.44, no.a7, 4911-4913.
Woojin Choi, Ogyun Seok, Hojin Ryu, Ho-Young Cha, Kwang-Seok Seo.
High-Voltage and Low-Leakage-Current Gate Recessed Normally-Off GaN MIS-HEMTs With Dual Gate Insulator Employing PEALD-
Kang, Myoung-Jin, Lee, Min-Seong, Choi, Gwang-Ho, Hwang, Il-Hwan, Cha, Ho-Young, Seo, Kwang-Seok. High-performance normally off AlGaN/GaN-on-Si HEMTs with partially recessed SiNx MIS structure : High-performance normally off AlGaN/GaN-on-Si HEMTs. Physica status solidi. PSS. A, Applications and materials science, vol.214, no.8, 1600726-.
Gonzalez-Posada, F., Bardwell, J.A., Moisa, S., Haffouz, S., Tang, H., Brana, A.F., Munoz, E.. Surface cleaning and preparation in AlGaN/GaN-based HEMT processing as assessed by X-ray photoelectron spectroscopy. Applied surface science, vol.253, no.14, 6185-6190.
Roh, Seung-Hyun, Eom, Su-Keun, Choi, Gwang-Ho, Kang, Myoung-Jin, Kim, Dong-Hwan, Hwang, Il-Hwan, Seo, Kwang-Seok, Lee, Jae-Gil, Byun, Young-Chul, Cha, Ho-Young. Normally-off AlGaN/GaN-on-Si metal-insulator-semiconductor heterojunction field-effect transistor with nitrogen-incorporated silicon oxide gate insulator. Journal of the Korean Physical Society, vol.71, no.4, 185-190.
Ronghua Wang, Saunier, P, Xiu Xing, Chuanxin Lian, Xiang Gao, Shiping Guo, Snider, G, Fay, P, Jena, D, Huili Xing. Gate-Recessed Enhancement-Mode InAlN/AlN/GaN HEMTs With 1.9-A/mm Drain Current Density and 800-mS/mm Transconductance. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.31, no.12, 1383-1385.
Ning Lu, Hook, Terence B., Johnson, Jeffrey B., Wermer, Carl, Putnam, Christopher, Wachnik, Richard A.. Efficient and Accurate Schematic Transistor Model of FinFET Parasitic Elements. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.34, no.9, 1100-1102.
Nuttinck, S., Gebara, E., Laskar, J., Harris, H.M.. Study of self-heating effects, temperature-dependent modeling, and pulsed load-pull measurements on GaN HEMTs. IEEE transactions on microwave theory and techniques, vol.49, no.12, 2413-2420.
Ťapajna, M., Jurkovič, M., Válik, L., Haščík, Š., Gregušová, D., Brunner, F., Cho, E.-M., Kuzmík, J.. Bulk and interface trapping in the gate dielectric of GaN based metal-oxide-semiconductor high-electron-mobility transistors. Applied physics letters, vol.102, no.24, 243509-.
Tian-Li Wu, Franco, Jacopo, Marcon, Denis, De Jaeger, Brice, Bakeroot, Benoit, Stoffels, Steve, Van Hove, Marleen, Groeseneken, Guido, Decoutere, Stefaan. Toward Understanding Positive Bias Temperature Instability in Fully Recessed-Gate GaN MISFETs. IEEE transactions on electron devices, vol.63, no.5, 1853-1860.
Chen, Wanjun, Wong, King-Yuen, Huang, Wei, Chen, Kevin J.. High-performance AlGaN∕GaN lateral field-effect rectifiers compatible with high electron mobility transistors. Applied physics letters, vol.92, no.25, 253501-.
Bin Lu, Saadat, O I, Palacios, T. High-Performance Integrated Dual-Gate AlGaN/GaN Enhancement-Mode Transistor. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.31, no.9, 990-992.
N.Ikeda R.Tamura T.Kokawa H.Kambayashi Y.Sato T.Nomura S.Kato IEEE ISPSD 23rd International Symposium 2011.
Lu, Bin, Matioli, Elison, Palacios, Tomás. Tri-Gate Normally-Off GaN Power MISFET. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.33, no.3, 360-362.
J.Wei S.Liu B.Li X.Tang Y.Lu C.Liu M.Hua Z.Zhang G.Tang K. J.Chen IEEE IEDM 2015.
Shuxun Lin, Maojun Wang, Fei Sang, Ming Tao, Wen, Cheng P., Bing Xie, Min Yu, Jinyan Wang, Yilong Hao, Wengang Wu, Jun Xu, Kai Cheng, Bo Shen. A GaN HEMT Structure Allowing Self-Terminated, Plasma-Free Etching for High-Uniformity, High-Mobility Enhancement-Mode Devices. IEEE electron device letters : a publication of the IEEE Electron Devices Society, vol.37, no.4, 377-380.
Lee, J.G., Kim, H.S., Seo, K.S., Cho, C.H., Cha, H.Y.. High quality PECVD SiO2 process for recessed MOS-gate of AlGaN/GaN-on-Si metal-oxide-semiconductor heterostructure field-effect transistors. Solid-state electronics, vol.122, 32-36.
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