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High‐Performance E‐Mode AlGaN/GaN MIS‐HEMT with Dual Gate Insulator Employing SiON and HfON

Physica status solidi. PSS. A, Applications and materials science, v.215 no.10, 2018년, pp.1700650 -   

Hwang, Il‐Hwan (Department of Electrical and Computer Engineering, and Inter‐) ,  Eom, Su‐Keun (University Semiconductor Research Center Seoul National University Seoul 151‐) ,  Choi, Gwang‐Ho (744 Korea) ,  Kang, Myoung‐Jin (Department of Electrical and Computer Engineering, and Inter‐) ,  Lee, Jae‐Gil (University Semiconductor Research Center Seoul National University Seoul 151‐) ,  Cha, Ho‐Young (744 Korea) ,  Seo, Kwang‐Seok (Department of Electrical and Computer Engineering, and Inter‐)

Abstract AI-Helper 아이콘AI-Helper

A high‐performance E‐mode AlGaN/GaN MIS‐HEMTs is fabricated with atomic layer deposited 5 nm SiON/16 nm HfON and with atomic layer deposited 22 nm HfON gate insulator and their characteristics are compared. Plasma nitridation is employed in every atomic layer deposition cycle to...

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