참고문헌 (19)

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3. IEEE Trans Electron Devices Onishi 50 384 2003 10.1109/TED.2002.807447 Improvement of surface carrier mobility of HfO2/MOSFETs by high-temperature forming gas annealing 

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5. Tech Dig - Int Electron Devices Meet IEDM Lue 199 2012 Radically extending the cycling endurance of Flash memory (to > 100M Cycles) by using built-in thermal annealing to self-heal the stress-induced damage 

6. Tech Dig - Int Electron Devices Meet IEDM Moon 794 2016 Sustainable electronics for nano-spacecraft in deep space missions 

7. Comsol multiphysics user's guide, Comsol Inc., Burlington, MA, USA; 2011. 

8. IEEE Electron Device Lett Moon 35 1236 2014 10.1109/LED.2014.2365235 A novel FinFET with high-speed and prolonged retention for dynamic memory 

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9. Appl Phys Lett Urakawa 102 2013 10.1063/1.4790619 Thermal analysis of amorphous oxide thin-film transistor degraded by combination of joule heating and hot carrier effect 

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10. Microelectron Reliab Fiege 38 957 1998 10.1016/S0026-2714(98)00086-9 Failure analysis of integrated devices by scanning thermal microscopy (SThM) 

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11. Int J Thermophys Ryu 36 1217 2015 10.1007/s10765-014-1681-6 Surface-temperature measurement and submicron defect isolation for microelectronic devices using thermoreflectance microscopy 

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12. Sci Rep Park 6 1 2016 Controllable electrical and physical breakdown of poly-crystalline silicon nanowires by thermally assisted electromigration 

13. Appl Phys Lett Ju 74 3005 1999 10.1063/1.123994 Phonon scattering in silicon films with thickness of order 100 nm 

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14. J Appl Phys Tai 63 1442 1988 10.1063/1.339924 Thermal conductivity of heavily doped low-pressure chemical vapor deposited polycrystalline silicon films 

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15. Solid-State Electron Pergamon Press Maycock 10 161 1967 10.1016/0038-1101(67)90069-X Thermal conductivity of silicon, germanium, Iii-V xompounds and Iii-V alloys 

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16. ACS Nano Choi 6 2378 2012 10.1021/nn2046295 Physical observation of a thermo-morphic transition in a silicon nanowire 

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17. Kasper 1995 Properties of strained and relaxed silicon germanium 

18. Bhandari 1995 CRC handbook of thermoelectrics 

19. IEEE Electron Device Lett Park 37 843 2016 10.1109/LED.2016.2574341 Local electro-thermal annealing for repair of total ionizing dose-induced damage in gate-all-around MOSFETs 

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