초록 ▼

A cathodic arc cathode is provided with an insulating ring in close proximity to the underside of the cantilevered edge of the target, and with no other conducting surface exposed in the coating system. An electrical connection is provided to opposite ends of the cathode through two or more low resi

A cathodic arc cathode is provided with an insulating ring in close proximity to the underside of the cantilevered edge of the target, and with no other conducting surface exposed in the coating system. An electrical connection is provided to opposite ends of the cathode through two or more low resistance resistors with high temperature coefficients of resistance. For all cases of cathodic arc deposition, the system causes the arc to reliably remain on the cathode surface and move randomly, thereby assuring uniform cathode erosion on large or small planar or cylindrical cathodes, which can be produced at low cost.

대표청구항 ▼

[ What is claimed is:] [20.] The method of vapor deposition using a cathodic arc cathode having a target, said target having a surface area; a cathode body; an insulator ring, said insulator ring being disposed around said cathode body and insulating said cathode body from the walls of said chamber;

[ What is claimed is:] [20.] The method of vapor deposition using a cathodic arc cathode having a target, said target having a surface area; a cathode body; an insulator ring, said insulator ring being disposed around said cathode body and insulating said cathode body from the walls of said chamber; a gap, said gap being about 0.015 to 0.150 inches and separating said target and said insulator ring; electrical means, said electrical means supplying power to said cathode body; an electrically insulated back, said insulated back being proximate, and extending beyond, the underside of said cathode body, to provide support for said insulator and insulation between said cathode body and said chamber wall; at least two resistors spaced from said cathode body, said resistors being alternatingly heated by said arc, producing a heated resistor and an unheated resistor, thereby alternating said arc between said heated resistor and said unheated resistor as said arc seeks the path of least resistance; a cooling channel, said cooling channel having a first feed and a second feed, coolant entering said cooling channel through said first feed and exiting said cooling channel through said second feed;comprising the steps of:placing the target onto the cathode body;activating the arc;vaporizing said target through the movement of said arc from a heated resistor to an unheated resistor as said arc seeks the path of least resistance;wherein said gap geometry prevents said arc from jumping from said target to said insulator ring, thereby preventing damage to said cathode body.