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[미국특허] Dual gate MOSFET 원문보기

IPC분류정보
국가/구분 United States(US) Patent 등록
국제특허분류(IPC7판)
  • H01L-027/01
출원번호 US-0320404 (2002-12-17)
우선권정보 JP-0174883 (1992-06-09)
발명자 / 주소
  • Takemura, Yasuhiko
출원인 / 주소
  • Semiconductor Energy Laboratory Co., Ltd.
대리인 / 주소
    Robinson Eric J.
인용정보 피인용 횟수 : 20  인용 특허 : 32

초록

In a field effect type device having a thin film-like active layer, there is provided a thin film-like semiconductor device including a top side gate electrode on the active layer and a bottom side gate electrode connected to a static potential, the bottom side gate electrode being provided between

대표청구항

1. An electronic device comprising at least one thin film transistor, said thin film transistor comprising:a substrate having an insulating surface;a semiconductor layer formed over said insulating surface;a source region and a drain region formed in said semiconductor layer;a channel region in said

이 특허에 인용된 특허 (32)

  1. Farb Joseph E. (Riverside CA) Li Mei (Mission Veijo CA) Chang Chen-Chi P. (Newport Beach CA) Chin Maw-Rong (Huntington Beach CA), Control of backgate bias for low power high speed CMOS/SOI devices.
  2. Sarma Kalluri R. (Mesa AZ), High mobility integrated drivers for active matrix displays.
  3. Ipri Alfred C. (Princeton NJ) Napoli Louis S. (Hamilton Square NJ), Low leakage silicon-on-insulator CMOS structure and method of making same.
  4. Kondo Shigeki (Hiratsuka JPX), Manufacturing method for SOI-type thin film transistor.
  5. Hartmann Jol (Claix FRX), Method for embodying an electric circuit on an active element of an MIS integrated circuit.
  6. Ogawa Hisashi (Katano JPX) Naito Yasushi (Toyonaka JPX) Fukumoto Masanori (Osaka JPX), Method for fabricating a semiconductor integrated circuit device including the self-aligned formation of a contact windo.
  7. Takemura Yasuhiko,JPX, Method for forming semiconductor device with bottom gate connected to source or drain.
  8. Okamoto Tatsuo (Itami JPX) Kotani Hideo (Itami JPX) Oono Takio (Itami JPX) Watabe Kiyoto (Itami JPX) Kinoshita Yasushi (Itami JPX) Nishikawa Yoshikazu (Itami JPX), Method for manufacturing interconnection structure in semiconductor device.
  9. Adan Alberto O. (Tenri JPX), Method of making a MOS thin film transistor with self-aligned asymmetrical structure.
  10. Kalnitsky Alexander (Dallas TX), Method of via formation for the multilevel interconnect integrated circuits.
  11. Neudeck Gerold W. (West Lafayette IN) Venkatesan Suresh (West Lafayette IN), Methods for fabricating a dual-gated semiconductor-on-insulator field effect transistor.
  12. Aozasa Hiroshi,JPX ; Hayashi Yutaka,JPX, Non-volatile memory cell having dual gate electrodes.
  13. Vasudev Prahalad K. (Santa Monica CA), Opposed dual-gate hybrid structure for three-dimensional integrated circuits.
  14. Wu Biing-Seng (Tainan TWX), Process of making a high photosensitive depletion-gate thin film transistor.
  15. Caviglia Anthony L. (Laurel MD) Cserhati Andras F. (Columbia MD) McKitterick John B. (Columbia MD), Radiation hard CMOS circuits in silicon-on-insulator films.
  16. Taur Yuan (Bedford NY) Wong Hon-Sum P. (Chappagua NY), Self-aligned double-gate MOSFET by selective lateral epitaxy.
  17. Takemura Yasuhiko,JPX, Semiconductor device and method for forming the same.
  18. Yasuhiko Takemura JP, Semiconductor device and method for forming the same.
  19. Hayashi Yutaka (Tsukuba JPX) Kamiya Masaaki (Tokyo JPX) Kojima Yoshikazu (Tokyo JPX) Takasu Hiroaki (Tokyo JPX), Semiconductor device for driving a light valve.
  20. Kerr, John A., Semiconductor device with reduced side wall parasitic device action.
  21. Hayashi Yutaka (Kanagawa JPX) Matsushita Takeshi (Kanagawa JPX), Semiconductor memory cell.
  22. Hwang Jeong-Mo (Plano TX), Silicon on insulator device comprising improved substrate doping.
  23. Mayer Donald C. (305 Via Colorin Palos Verdes CA 90274) MacWilliams Kenneth P. (1917 Nelson Ave. ; #A Redondo Beach CA 90278), Silicon-on-insulator gate-all-around mosfet fabrication methods.
  24. Hayashi Hisao (Kanagawa JPX) Negishi Michio (Kanagawa JPX) Noguchi Takashi (Kanagawa JPX) Ohshima Takefumi (Kanagawa JPX) Hayashi Yuji (Kanagawa JPX) Maekawa Toshikazu (Kanagawa JPX) Matsushita Takes, Thin film MOS transistor having pair of gate electrodes opposing across semiconductor layer.
  25. Ishizu Akira (Amagasaki JPX) Nishimura Tadashi (Itami JPX) Inoue Yasuo (Itami JPX), Thin film semiconductor device with oxide film on insulating layer.
  26. Nishihara Yoshio (Kanagawa JPX), Thin film transistor.
  27. Tanaka Keiji (Saitama JPX) Nakazawa Kenji (Saitama JPX) Suyama Shiro (Saitama JPX) Kato Kinya (Saitama JPX), Thin film transistor.
  28. Yamazaki Tsuneo (Tokyo JPX), Thin film transistor.
  29. Wakai Haruo (Fussa JPX) Yamamura Nobuyuki (Hachioji JPX) Sato Syunichi (Kawagoe JPX) Kanbara Minoru (HAchioji JPX), Thin film transistor array having single light shield layer over transistors and gate and drain lines.
  30. Hamada Koji (Tokyo JPX), Thin film transistor with a sub-gate structure and a drain offset region.
  31. Iwamatsu Seiichi (Suwa JPX), Thin-film SOI semiconductor device having heavily doped diffusion regions beneath the channels of transistors.
  32. Zhang Hongyong,JPX ; Takayama Toru,JPX ; Takemura Yasuhiko,JPX ; Miyanaga Akiharu,JPX ; Ohtani Hisashi,JPX, Transistor and semiconductor device.

이 특허를 인용한 특허 (20)

  1. Marino, Fabio Alessio; Menegoli, Paolo, Area efficient field effect device.
  2. Marino, Fabio Alessio; Menegoli, Paolo, Body tied intrinsic FET.
  3. Wilson, Dale G.; Hackler, Sr., Douglas R., Double-gated transistor memory.
  4. Marino, Fabio Alessio; Menegoli, Paolo, High mobility enhancement mode FET.
  5. Marino, Fabio Alessio; Menegoli, Paolo, High performance multigate transistor.
  6. Yamazaki,Shunpei; Ohtani,Hisashi; Shimada,Hiroyuki; Sakama,Mitsunori; Abe,Hisashi; Teramoto,Satoshi, Manufacturing method of a thin film semiconductor device.
  7. Miyairi, Hidekazu; Osada, Takeshi; Yamazaki, Shunpei, Method for manufacturing semiconductor device.
  8. Miyairi, Hidekazu; Osada, Takeshi; Yamazaki, Shunpei, Method for manufacturing semiconductor device.
  9. Yamazaki, Shunpei; Ohtani, Hisashi; Shimada, Hiroyuki; Sakama, Mitsunori; Abe, Hisashi; Teramoto, Satoshi, Method of manufacturing a semiconductor device.
  10. Yamazaki,Shunpei; Ohtani,Hisashi; Shimada,Hiroyuki; Sakama,Mitsunori; Abe,Hisashi; Teramoto,Satoshi, Method of manufacturing a semiconductor device.
  11. Miyairi, Hidekazu; Osada, Takeshi; Yamazaki, Shunpei, Semiconductor device.
  12. Nishimura, Jun; Yasutake, Nobuaki; Okamura, Takayuki, Semiconductor device.
  13. Yamazaki, Shunpei, Semiconductor device and its manufacturing method.
  14. Kuwabara, Hideaki; Tanaka, Koichiro, Semiconductor device and manufacturing method thereof.
  15. Kato,Juri, Semiconductor device and method for manufacturing the same.
  16. Miyairi, Hidekazu; Osada, Takeshi; Yamazaki, Shunpei, Semiconductor device comprising an oxide semiconductor layer.
  17. Miyairi, Hidekazu; Osada, Takeshi; Yamazaki, Shunpei, Semiconductor device including oxide semiconductor layer.
  18. Kuwabara,Hideaki; Tanaka,Koichiro, Semiconductor manufacturing method.
  19. Wilson, Dale G.; Hackler, Sr., Douglas R., Single transistor memory with immunity to write disturb.
  20. Yamazaki, Shunpei; Ohtani, Hisashi; Shimada, Hiroyuki; Sakama, Mitsunori; Abe, Hisashi; Teramoto, Satoshi, Substrate processing apparatus and a manufacturing method of a thin film semiconductor device.

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