초록

○ 국부 가열 나노선/나노파티클 동시성장 공정 개발
○ 소자제작을 위한 나노파티클 정렬법 개발
○ 자외선 및 인장 센서 개발

(출처 : 보고서 요약서 3p)

Abstract ▼

This project has the following purposes; (1)simultaneous growth of semiconductor nanowires/nanoparticles by low-cost locally heated aqueous chemical growth (LHACG) process,(2)investigation on the correlation between growth parameters of LHACG method and the nanostructures morphology,(3)development o

This project has the following purposes; (1)simultaneous growth of semiconductor nanowires/nanoparticles by low-cost locally heated aqueous chemical growth (LHACG) process,(2)investigation on the correlation between growth parameters of LHACG method and the nanostructures morphology,(3)development of the array method of nanowires and nanoparticles for the fabrication of electronic devices,(4)fabrication of electronic devices (single nanowire based transistors, thin film transistors and sensors) using LHACG nanostructures with improved performances.
This LHACG technique has abilities to (i) produce long NWs, and (ii) reduce contamination by avoiding the formation of unwanted long nanorods in the bulk of solution, and (iii) simultaneous production of nanoparticles (NPs) in the form of precipitation at the cooler bottom part of the system. The morphology of the nanostructures can be varied by a precise control over the process parameters. Afterwards, nanostructure based transistors and sensors will be fabricated using the optimized nanostructures. This robust and versatile LHACG approach will provide a suitable platform to several semiconductors in order to develop and co-integration of next generation of composite, embedded, hybrid low-dimensional electronics device and sensors.

As a result, we
‣ developed local heating system with an area 4 cm2 and seed free growth
‣ obtained nanowire density 160/um2 and growth rate 107.7 nm/h
‣ obtained growth lasting time 20h and uniformaty 85%
‣ obtained patterning line width under 12 ㎛
‣ determined material propertied for shape of nanomaterials ; Zn/O ratio and crystal structure
‣ developed monlayer formation method with alchole-ater system
‣ fabricated and evaluated UV sensing device based on ZnO nanowire
‣ fabricated and evaluated UV sensing device based on monolayer of ZnO nanoparticle
‣ fabricated and evaluated strain-UV dual sensing device

Our results will be expected as the followings; (i) Simultaneous production of semiconductor nanowires and nanoparticles by locally-heated aqueous chemical growth (LHACG), which can be easily separable. (ii) Nanowires with higher growth rate and vertical alignment by LHACG method (iii) Fabrication of long nanowires by LHACG method (iv) Nanoparticles with various dimensions (few nm-few hundred nm) (v) Nanostructures of better quality (vi) Nanoelectronic devices (Single nanowire based transistors , thin film transistors and sensors) with enhanced performance

(출처 : SUMMARY 5p)

목차 Contents

• 표지 ... 1
• 제 출 문 ... 2
• 보고서 요약서 ... 3
• 요 약 문 ... 4
• SUMMARY ... 5
• CONTENTS ... 6
• 목차 ... 7
• 제1장 연구개발과제의 개요 ... 8
• 1절 연구개발의 목적 ... 8
• 2절 연구개발의 중요성 ... 9
• 제2장 국 내외 기술 개발 현황 ... 11
• 제3장 연구개발수행 내용 및 결과 ... 12
• 1절 소면적 국부 가열 수열 합성 공정 개발 ... 12
• 1. 국부가열 시스템 제작 ... 12
• 2. 산와아연 나노 와이어 및 나노 입자 합성 ... 14
• 2절 대면적 국부 가열 수열 합성 공정 개발 ... 23
• 1. 대면적 국부가열 시스템 제작 및 패터닝 ... 23
• 2. 대면적 수열합성, 패터닝 및 정렬 ... 27
• 3절 국부가열 공정 기반 센서 소자 개발 ... 40
• 1. 나노 선 기반 소자 ... 40
• 2. 나노 입자 기반 소자 ... 44
• 제4장 목표달성도 및 관련분야에의 기여도 ... 60
• 1절 연구 목표 및 달성도 평가 ... 60
• 2절 관련분야 기술 발전에의 기여도 ... 61
• 제5장 연구개발결과의 활용계획 ... 62
• 제6장 연구개발과정에서 수집한 해외과학기술정보 ... 63
• 제7장 참고문헌 ... 74
• 끝페이지 ... 75