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한국세라믹학회지 = Journal of the Korean Ceramic Society, v.40 no.10 = no.257, 2003년, pp.967 - 972
석진우 (주식회사 피앤아이 기술연구소) , (국립모스크바대학교 물리학과) , 한성 (주식회사 피앤아이 기술연구소) , 백영환 (주식회사 피앤아이 기술연구소) , 고석근 (주식회사 피앤아이 기술연구소) , 윤기현 (연세대학교 세라믹공학과)
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The inner-diameter 5 cm cold hollow cathode ion source was designed for the high current density and the homogeneous beam profile of ion beam. The ion source consisted of a cylindrical cathode, a generation part of magnetic field, a plasma chamber, convex type ion optic system with two grid electrod...
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