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NTIS 바로가기Transactions on electrical and electronic materials, v.6 no.4, 2005년, pp.164 - 168
Kim, Nam-Hoon (Research Institute of Energy Resources Technology, Chosun University) , Seo, Yong-Jin (Department of Electrical and Electronic Engineering, Daebul University) , Ko, Pil-Ju (Department of Electrical Engineering, Chosun University) , Lee, Woo-Sun (Department of Electrical Engineering, Chosun University)
Effects of high-temperature slurry were investigated on the chemical mechanical polishing (CMP) performance of tetra-ethyl ortho-silicate (TEOS) film with silica and ceria slurries by the surface analysis of X-ray photoelectron spectroscopy (XPS). The pH showed a slight tendency to decrease with inc...
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