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NTIS 바로가기전기전자재료학회논문지 = Journal of the Korean institute of electronic material engineers, v.20 no.5, 2007년, pp.399 - 402
Cho, Won-Ju (Department of Electronic Materials Engineering, Kwangwoon University) , Koo, Hyun-Mo (Department of Electronic Materials Engineering, Kwangwoon University) , Lee, Woo-Hyun (Department of Electronic Materials Engineering, Kwangwoon University) , Koo, Sang-Mo (Department of Electronic Materials Engineering, Kwangwoon University) , Chung, Hong-Bay (Department of Electronic Materials Engineering, Kwangwoon University)
The effects of heat treatment on the electrical properties of strained-Si/SiGe-on-insulator (SGOI) devices were examined. We proposed the optimized heat treatment processes for improving the back interfacial electrical properties in SGOI-MOSFET. By applying the additional pre-RTA (rapid thermal anne...
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