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NTIS 바로가기International journal of precision engineering and manufacturing, v.14 no.2, 2013년, pp.215 - 221
Kim, Hyung-Tae (Smart System Research Group, KITECH) , Lee, Kang-Won (Smart System Research Group, KITECH) , Yang, Hae-Jeong (Department of Mechanical Design Engineering, Korea Polytechnic University) , Kim, Sung-Chul (AmTechnology, Asan Technovalley)
We propose a self-learning method for automatic wafer alignment in the semiconductor manufacturing process. A feed forward neural network is trained by and used for wafer alignment. The network determines the movement of kinematic parts from the misalignment inspected by machine vision. However, it ...
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