최소 단어 이상 선택하여야 합니다.
최대 10 단어까지만 선택 가능합니다.
다음과 같은 기능을 한번의 로그인으로 사용 할 수 있습니다.
NTIS 바로가기Korean chemical engineering research = 화학공학, v.53 no.5, 2015년, pp.557 - 564
민선기 (한국기술교육대학교 응용화학공학과) , 한갑수 (씨엔비 산업(주)) , 유성식 (한국기술교육대학교 응용화학공학과)
The previous etching, rinsing and drying processes of wafers for MEMS (microelectromechanical system) using SC-
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