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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.19 no.4, 2020년, pp.121 - 125
이용호 (명지대학교 공과대학 전자공학과) , 최정은 (명지대학교 공과대학 전자공학과) , 홍상진 (명지대학교 공과대학 전자공학과)
With miniaturization of semiconductor, the manufacturing process become more complex, and undetected small changes in the state of the equipment have unexpectedly changed the process results. Fault detection classification (FDC) system that conducts more active data analysis is feasible to achieve m...
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