[논문]코발트와 니켈이 스퍼터링된 구리 포일에서 어닐링 시간에 따른 그래핀 성장

오예찬; 이우진; 김상호

doi:10.5695/jkise.2021.54.3.124

코발트와 니켈이 스퍼터링된 구리 포일에서 어닐링 시간에 따른 그래핀 성장
Graphene Growth on the Cobalt and Nickel Sputtered Cu foil Depending on the Annealing Time 원문보기

한국표면공학회지 = Journal of the Korean institute of surface engineering, v.54 no.3, 2021년, pp.124 - 132

오예찬 (한국기술교육대학교 에너지신소재화학공학부) , 이우진 (한국기술교육대학교 에너지신소재화학공학부) , 김상호 (한국기술교육대학교 에너지신소재화학공학부)

Abstract ▼ AI-Helper

Graphene which grown on the cobalt or nickel sputtered copper foil depending on the annealing time was studied. Graphene on the copper foil grown by chemical vapor deposition was compared to those on cobalt or nickel sputtered copper foil by using a RF (Radio Frequency) magnetron sputtering at room temperature. FLG(few-layer graphene) was identified independent of substrates by Raman and X-Ray Photoelectron Spectroscopy analyses. On copper foil, size and area fraction of the graphene growth increased until 30 minutes annealing and then didn't changed. Comparing to that, graphene on the cobalt refined till 50 minutes annealing, after then the effect disappeared which means a similar shape to that on copper foil. On nickel the graphene refined irrespective of annealing time that is possibly because of the complete solid solution of nickel with copper.

주제어

표/그림 (13)

그림 Fig. 1 Growth conditions of graphene on the foils depending on the annealing time.
그림 Fig. 2 Microstructure of graphene grown on Cu foil depending on the annealing time. (a), (b), (c), (d), (e), (f), (g), (h) are that of 0, 10, 20, 30, 40, 50, 60, 70min respectively.
그림 Fig. 3 Raman spectra of graphene grown on Cu foil depending on the annealing time. (a), (b), (c), (d), (e), (f), (g), (h) are that of 0, 10, 20, 30, 40, 50, 60, 70min respectively.
그림 Fig. 4 XPS spectrum of graphene on Cu foil analyzed by XPS wide, narrow scan and depth profile. (a) XPS spectrum by wide scan, (b) XPS spectrum of C 1s by narrow scan, (c) Atomic weight percent profile by XPS depth profile.
표 Table 1 2D/G ratio and 2D peak FWHM of Cu foil depending on annealing time
그림 Fig. 5 Microstructure of graphene grown on Co sputtered Cu foil depending on the annealing time. (a), (b), (c), (d), (e), (f), (g), (h) are that of 0, 10, 20, 30, 40, 50, 60, 70min respectively.
그림 Fig. 6 Phase diagram of cobalt-copper alloys[16].
그림 Fig. 7 Raman spectra of graphene grown on Co sputtered Cu foil depending on the annealing time. (b), (c), (d), (e), (f), (g), (h) are that of 10, 20, 30, 40, 50, 60, 70min respectively.
그림 Fig. 8 Microstructure of graphene grown on Ni sputtered Cu foil depending on the annealing time. (a), (b), (c), (d), (e), (f), (g), (h) are that of 0, 10, 20, 30, 40, 50, 60, 70min respectively.
표 Table 2 2D/G ratio and 2D peak FWHM of Cu-Co foil depending on annealing time
그림 Fig. 9 Phase diagram of nickel-copper alloys[17].
그림 Fig. 10 Raman spectra of graphene grown on Ni sputtered Cu foil depending on the annealing time. (b), (c), (d), (e), (f), (g), (h) are that of 10, 20, 30, 40, 50, 60, 70min respectively.
표 Table 3 2D/G ratio and 2D peak FWHM of Cu-Ni foil depending on annealing time

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