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Sensors and actuators. B, Chemical, v.96 no.1/2, 2003년, pp.226 - 233
Matsunaga, Naoki (Department of Molecular and Material Sciences, Interdisciplinary Graduate School of Engineering Sciences, Kyushu University, Kasuga-shi, Fukuoka 816-8580, Japan) , Sakai, Go (Department of Molecular and Material Sciences, Faculty of Engineering Sciences, Kyushu University, Kasuga-shi, Fukuoka 816-8580, Japan) , Shimanoe, Kengo (Department of Molecular and Material Sciences, Faculty of Engineering Sciences, Kyushu University, Kasuga-shi, Fukuoka 816-8580, Japan) , Yamazoe, Noboru (Department of Molecular and Material Sciences, Faculty of Engineering Sciences, Kyushu University, Kasuga-shi, Fukuoka 816-8580, Japan)
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AbstractIn response and recovery steps of a thin film semiconductor gas sensor, target gas molecules diffuse in and out of the thin film. The gas diffusion dynamics taking place in these steps have been formulated based on a simple reaction–diffusion equation assuming a first-order reaction o...
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