An assembly, which in one form is a pedestal, includes an upper member, a lower member bonded to the upper member, and a thermal phase diffuser disposed between the upper member and the lower member within a hermetically sealed volume. The thermal phase diffuser diffuses heat by way of a phase chang
An assembly, which in one form is a pedestal, includes an upper member, a lower member bonded to the upper member, and a thermal phase diffuser disposed between the upper member and the lower member within a hermetically sealed volume. The thermal phase diffuser diffuses heat by way of a phase change of a working fluid within the hermetically sealed volume. The assembly/pedestal is capable of operating at high temperatures, in excess of 1000° C., with a high degree of temperature uniformity, and in one form is an aluminum nitride (AlN) material.
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1. An assembly comprising: an upper member;a lower member; anda thermal phase diffuser disposed between the upper member and the lower member within a hermetically sealed volume,wherein the thermal phase diffuser diffuses heat by way of a phase change of a working fluid within the hermetically seale
1. An assembly comprising: an upper member;a lower member; anda thermal phase diffuser disposed between the upper member and the lower member within a hermetically sealed volume,wherein the thermal phase diffuser diffuses heat by way of a phase change of a working fluid within the hermetically sealed volume. 2. The assembly according to claim 1, further comprising a filling material disposed within a gap between the thermal phase diffuser and the lower member. 3. The assembly according to claim 2, wherein the filling material includes a high temperature compressible material. 4. The assembly according to claim 2, wherein the filling material is selected from a group consisting of Grafoil, aluminum nitride (AlN) powder, ceramic paste, and flexible graphite/graphene. 5. The assembly according to claim 1, further comprising a bonding layer disposed between the upper member and the thermal phase diffuser. 6. The assembly according to claim 5, wherein the bonding layer includes a titanium-nickel braze alloy. 7. The assembly according to claim 1, wherein the upper member includes an upper wall and a peripheral wall extending downwardly from the upper wall, the thermal phase diffuser being surrounded by the peripheral wall of the upper member. 8. The assembly according to claim 7, wherein the lower member is bonded to the peripheral wall of the upper member. 9. The assembly according to claim 1, wherein the upper member and the lower member are made of different materials. 10. The assembly according to claim 1, wherein the thermal phase diffuser includes a tubular shell having a T-shape cross section. 11. The assembly according to claim 1, wherein the thermal phase diffuser further includes a wick structure, the wick structure defining a vapor guiding channel. 12. The assembly according to claim 11, wherein vapor of the working fluid flows in the vapor guiding channel and liquid of the working fluid flows along the wick structure and outside the vapor guiding channel. 13. The assembly according to claim 12, wherein the vapor of the working fluid flows in a direction perpendicular to the upper member. 14. The assembly according to claim 1, wherein the thermal phase diffuser includes a plate portion and a shaft portion extending from a lower surface of the plate portion and being perpendicular to the plate portion. 15. The assembly according to claim 14, further comprising a shaft member disposed under the lower member, the filling material also disposed between the shaft member and the shaft portion of the thermal phase diffuser. 16. The assembly according to claim 1, wherein the working fluid is selected from a group consisting of liquid helium, mercury, sodium, sulphur, halides, indium, Cesium, NaK, potassium, lithium, sliver, ammonia, alcohol, methanol, ethanol, acetone, methyl alcohol, water, Naphthalene, or other molten materials. 17. The assembly according to claim 1, further comprising a resistive heater surrounding a portion of the thermal phase diffuser. 18. The assembly according to claim 1, wherein the upper member is bonded to the lower member. 19. The assembly according to claim 1, wherein the upper member and the lower member are a single unitized part. 20. An assembly comprising: a ceramic substrate defining a hermetically sealed fluid channel containing a working fluid; anda thermal phase diffuser disposed within the hermetically sealed fluid channel,the working fluid flowing in the hermetically sealed fluid channel and including a plurality of discrete liquid slugs and vapor bubbles. 21. The assembly according to claim 20, wherein the ceramic substrate is Aluminum Nitride (AlN).
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