Electrostatic chuck with reduced arcing
원문보기
IPC분류정보
국가/구분 |
United States(US) Patent
등록
|
국제특허분류(IPC7판) |
|
출원번호 |
US-0884967
(2010-09-17)
|
등록번호 |
US-8270141
(2012-09-18)
|
발명자
/ 주소 |
- Willwerth, Michael D.
- Palagashvili, David
- Buchberger, Jr., Douglas A.
- Chafin, Michael G.
|
출원인 / 주소 |
|
대리인 / 주소 |
|
인용정보 |
피인용 횟수 :
1 인용 특허 :
7 |
초록
▼
Embodiments of electrostatic chucks are provided herein. In some embodiments, an electrostatic chuck may include a body having a notched upper peripheral edge, defined by a first surface perpendicular to a body sidewall and a stepped second surface disposed between the first surface and a body upper
Embodiments of electrostatic chucks are provided herein. In some embodiments, an electrostatic chuck may include a body having a notched upper peripheral edge, defined by a first surface perpendicular to a body sidewall and a stepped second surface disposed between the first surface and a body upper surface, and a plurality of holes disposed through the body along the first surface; a plurality of fasteners disposed through the plurality of holes to couple the body to a base disposed beneath the body; a dielectric member disposed above the body upper surface to electrostatically retain a substrate; an insulator ring disposed about the body within the notched upper peripheral edge and having a stepped inner sidewall that mates with the stepped second surface to define a non-linear interface therebetween; and an edge ring disposed over the insulator ring, the non-linear interface limiting arcing between the edge ring and the fastener.
대표청구항
▼
1. An electrostatic chuck, comprising: a body having a notched upper peripheral edge, defined by a first surface perpendicular to a sidewall of the body and a stepped second surface disposed between the first surface and an upper surface of the body, and a plurality of holes disposed through the bod
1. An electrostatic chuck, comprising: a body having a notched upper peripheral edge, defined by a first surface perpendicular to a sidewall of the body and a stepped second surface disposed between the first surface and an upper surface of the body, and a plurality of holes disposed through the body along the first surface of the notched upper peripheral edge;a plurality of fasteners disposed through respective ones of the plurality of holes to couple the body to a base disposed beneath the body;a dielectric member disposed above the upper surface of the body to electrostatically retain a substrate disposed thereon;an insulator ring disposed about the body and within the notched upper peripheral edge, the insulator ring having a stepped inner sidewall that mates with the stepped second surface of the notched upper peripheral edge to define a non-linear interface therebetween; andan edge ring disposed over the insulator ring, wherein the non-linear interface limits arcing between the edge ring and the fastener when RF power is applied to the electrostatic chuck. 2. The electrostatic chuck of claim 1, wherein the body further comprises: a plurality of heat transfer fluid conduits disposed proximate a lower surface of the body. 3. The electrostatic chuck of claim 1, wherein the body further comprises: a plurality of heat transfer gas conduits disposed proximate the upper surface of the body. 4. The electrostatic chuck of claim 1, wherein the body comprises an electrically conductive material. 5. The electrostatic chuck of claim 1, wherein the base further comprises: an upper member coupled the body via the fasteners; anda lower member disposed below the upper member. 6. The electrostatic chuck of claim 5, wherein the upper member comprises an electrically conductive material. 7. The electrostatic chuck of claim 1, further comprising: a second insulator ring circumscribing the body and the base. 8. The electrostatic chuck of claim 7, further comprising: a grounding shell circumscribing the second insulator ring, wherein the second insulator ring electrically insulates the grounding shell from the body and at least a portion of the base. 9. The electrostatic chuck of claim 1, wherein each fastener comprises a screw. 10. The electrostatic chuck of claim 1, the dielectric member further comprising: a lip circumscribing the dielectric member proximate the upper surface of the body, the lip extending to the peripheral edge of the upper surface of the body. 11. The electrostatic chuck of claim 10, wherein an inner edge of the edge ring is disposed over the lip of the dielectric member. 12. The electrostatic chuck of claim 1, wherein the dielectric member further comprises: one or more chucking electrodes disposed therein. 13. The electrostatic chuck of claim 1, wherein stepped inner sidewall of the insulator ring further comprises: a first portion extending downward from the insulator ring towards the first surface of the notched upper peripheral edge of the body; anda second portion extending laterally from the insulator ring along the stepped second surface of the notched upper peripheral edge of the body. 14. The electrostatic chuck of claim 1, wherein the insulator ring comprises quartz. 15. The electrostatic chuck of claim 1, wherein the edge ring is disposed within a ledge disposed in an upper inner edge of the insulator ring. 16. The electrostatic chuck of claim 15, further comprising: a second edge ring disposed atop an upper surface of the insulator ring. 17. The electrostatic chuck of claim 16, wherein the second edge ring comprises silicon (Si). 18. The electrostatic chuck of claim 1, wherein the edge ring further comprises: a ledge disposed about an upper inner edge of the edge ring, wherein the ledge is configured to be disposed beneath a substrate when the substrate is disposed on the dielectric member of the electrostatic chuck. 19. The electrostatic chuck of claim 18, wherein the substrate is disposed above the ledge when positioned on the electrostatic chuck and does not contact the edge ring. 20. The electrostatic chuck of claim 1, wherein the edge ring comprises silicon (Si).
이 특허에 인용된 특허 (7)
-
Shamouilian Shamouil ; Kumar Ananda ; Kholodenko Arnold ; Grimard Dennis S. ; Wang Liang Guo ; Schneider Gerhard ; Chafin Michael G. ; Kats Semyon ; Veytser Alexander ; Thach Senh, Connectors for an electrostatic chuck and combination thereof.
-
Kwon, Gi-Chung; Byun, Hong-Sik; Lee, Sung-Weon; Kim, Hong-Seub; Han, Sun-Seok; Ko, Bu-Jin; Kim, Joung-Sik, Electrostatic chuck for preventing an arc.
-
Weldon Edwin C. ; Collins Kenneth S. ; Donde Arik ; Lue Brian ; Maydan Dan ; Steger Robert J. ; Dyer Timothy ; Kumar Ananda H. ; Veytser Alexander M. ; Narendrnath Kadthala R. ; Kats Semyon L. ; Khol, Electrostatic chuck having improved gas conduits.
-
Sago,Yasumi; Kaneko,Kazuaki; Okada,Takuji; Ikeda,Masayoshi, Electrostatic chucking stage and substrate processing apparatus.
-
Maraschin Robert ; Shufflebotham Paul Kevin ; Barnes Michael Scott, Electrostatic clamp with lip seal for clamping substrates.
-
Zheng, Hui; Tsai, Kenneth; Wang, Hong; He, Yongxiang; Garcia, III, Jesus G.; Deyo, Daniel M., Guard for electrostatic chuck.
-
Kim, Jin-Man; Yang, Yun-Sik; Min, Young-Min; Kim, Sang-Ho, Semiconductor etching apparatus.
이 특허를 인용한 특허 (1)
-
Chang, Mei; Kao, Chien-Teh; Huang, Juno Yu-Ting, In-situ corrosion resistant substrate support coating.
※ AI-Helper는 부적절한 답변을 할 수 있습니다.