[논문]Analysis of High Vacuum System Based on the Applications of Vacuum Materials

Kim, Hyung-Taek

doi:10.4313/teem.2013.14.6.334

[국내논문] Analysis of High Vacuum System Based on the Applications of Vacuum Materials 원문보기

Transactions on electrical and electronic materials, v.14 no.6, 2013년, pp.334 - 338

Kim, Hyung-Taek (Department of Advanced Materials Engineering, College of Engineering, Incheon National University)

Abstract ▼ AI-Helper

In this study, the outgassing effects of selected vacuum materials on the vacuum characteristics were simulated by the $VacSim^{Multi}$ simulation tool. This investigation examined the feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials (aluminum, copper, stainless steel, nickel plated steel, Viton A). The optimum design factors for these vacuum systems were suggested based on the simulation results. The baking-out effects of the modeled systems and materials on the performance of the vacuum system were also analyzed. The simulation predicted that the overall outgassing effect was more significant in the turbomolecular pump system than in the diffusion pump system and that the utilization of a booster pump has a greater effect on the evacuation time than on the ultimate pressure.

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문제 정의

The simulation also suggested that polished copper would be a better candidate as a vacuum chamber material than the other materials to minimize the outgassing. This work indicated that the polishing treatment of copper for vacuum applications could be a useful topic for further research. The appreciable outgassing and slight baking out effect of anodized aluminum on the ultimate pressure showed that the simulation results were in agreement with the previous works [10].

가설 설정

The outgassing characteristics obtained in situ are plotted in the form of the pump-down curves in Fig. 4. The dynamic pump-down curves with and without the outgassing effects are indicated by the dotted and solid lines, respectively. Stainless steel was selected as the investigated material due to its common applications in vacuum systems.

제안 방법

To achieve pressures in the ultra high vacuum (UHV) and especially the extremely high vacuum (XHV) ranges, it is essential to minimize the outgassing from the chamber materials [1,2]. In this work, we simulated the outgassing effects of selected vacuum materials on the vacuum characteristics of modeled vacuum systems. The feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials was examined in this investigation.
Modeling was also performed on the commercial specifications of vacuum systems used in experimental applications. Three different UHV pumping combinations were employed in this modeling with fixed design factors for the chamber, exhaust pipelines, and valves. The simulation design factors of the modeled UHV systems were fixed; the same parameters were used except for the pumping combinations in each simulation.
To study the reliability and feasibility of using simulation, three different UHV systems were modeled. Also, in order to confirm the consistency of the simulation results, each of the three modeled systems was simulated separately for each of the studied materials without and with outgassing effects. Only the optimum simulation results, which were obtained after numerous repetitive simulations, were illustrated in the figures and tables.
The simulation design factors of the modeled UHV systems were fixed; the same parameters were used except for the pumping combinations in each simulation. Three different combinations of pumping systems were employed in this modeling, viz. turbo-molecular-rotary, diffusion-rotary, and diffusion-booster-rotary pumps. The proposed UHV systems have a straight pipelines with a length of 0.

대상 데이터

Three different UHV systems based on the pumping combinations were modeled by the VacSim^Multi simulation tool [12,13]. The outgassing characteristics of stainless steel, anodized aluminum, polished copper, nickel plated steel, and Viton A in the proposed simulation models were examined. Each of the modeled vacuum systems was simulated separately for each of the selected materials with and without the outgassing effects.
turbo-molecular-rotary, diffusion-rotary, and diffusion-booster-rotary pumps. The proposed UHV systems have a straight pipelines with a length of 0.3 m and a diameter of 0.0254 m. The valves which were employed had internal aperture areas of 5×10^-4 m² and 5×10^-3 m²for rough and high vacuum pumping, respectively, and were normally closed in the absence of a signal.

이론/모형

The feasibility of reliably simulating the outgassing characteristics of common vacuum chamber materials was examined in this investigation. Three different UHV systems based on the pumping combinations were modeled by the VacSim^Multi simulation tool [12,13]. The outgassing characteristics of stainless steel, anodized aluminum, polished copper, nickel plated steel, and Viton A in the proposed simulation models were examined.

성능/효과

Stainless steel was selected as the investigated material due to its common applications in vacuum systems. The simulation results indicated that the overall outgassing effects are more significant in the TMP system than in the DP systems. The ultimate stabilized pressure of the TMP system with outgassing effects was 10^-4 Pa.
The obtained simulation results are plotted in the form of in situ dynamic pump-down curves for each model. The simulation predicted that the outgassing effect would be more significant in the TMP system than in the DP system. An ultimate pressure in the UHV range could not be reached in the TMP system without the prior baking out treatment of the materials employed.
An ultimate pressure in the UHV range could not be reached in the TMP system without the prior baking out treatment of the materials employed. The simulation also indicated that the utilization of a booster pump would have a greater effect on the evacuation time than on the ultimate pressure. A considerable decrease of the evacuation time was observed in the case of the booster DP system with outgassing.

참고문헌 (12)

Jousten Karl, Nakhosteen C. Benjamin. Handbook of vacuum technology, Wiley-VCH Verlag GmbH; 2008.
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J. M. Lafferty. Foundations of vacuum science and technology. John Wiley and Sons; 1998.
Yoshimura Nagamitsu. Vacuum technology practice for scientific instruments. Springer; 2008.
Hucknall, D. J., Mois A., Vacuum technology calculations in chemistry. Royal society of chemistry; 2003.
Chamber A., Basic vacuum technology (2nd Ed.). Taylor & Francis Group; 1998.
John F. O'Hanlon. A user's guide to vacuum technology. John Wiley and Sons; 1989.
E. D. Erikson, T. G. Beat, D. D. Berger, B. A. Frazier. Vacuum 1987; 37: 379.
Y. Hirohata, A. Mutoh, T. Yamashina, T. Kikuchi, N. Ohsako. Vacuum 1996; 47: 727-731.

상세보기
Redhead Paul A., Vacuum science & technology pioneers of the 20th century. American Institute of Physics; 1997.
F. Grangeon, C. Monnin, M. Mangeard, D. Paulin. Vacuum 2004; 73: 243-248.

상세보기
Technology Sources Ltd., User's Guide of $VacSim^{Multi}$ Simulator (manual), 2001.

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