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NTIS 바로가기반도체디스플레이기술학회지 = Journal of the semiconductor & display technology, v.21 no.4, 2022년, pp.65 - 70
김미진 (한국공학대학교 IT반도체융합공학부) , 고광인 (차세대 융합기술원) , 구교문 (한국공학대학교 메카트로닉스공학부) , 심재홍 (한국공학대학교 메카트로닉스공학부) , 김기현 (한국공학대학교 메카트로닉스공학부)
In manufacturing and semiconductor industries, transfer robots increase productivity through accurate and continuous work. Due to the nature of the semiconductor process, there are environments where humans cannot intervene to maintain internal temperature and humidity in a clean room. So, transport...
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